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Examination apparatus for biological sample and chemical sample

  • US 20080061323A1
  • Filed: 10/29/2007
  • Published: 03/13/2008
  • Est. Priority Date: 01/21/2004
  • Status: Active Grant
First Claim
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1. An unpackaged semiconductor integrated circuit device formed to be used in a solution, and having an SOI substrate in which a support substrate, a buried insulating layer, and a semiconductor layer are stacked thereon in order, and an integrated circuit is formed on said semiconductor layer, comprising:

  • a guard ring layer which is formed with an n-type impurity diffusion layer in said semiconductor layer and which surrounds a formation area of said integrated circuit, said guard ring reaching said buried insulating layer; and

    a floating layer which is formed with an p-type impurity diffusion layer in said semiconductor layer and which surrounds said guard ling layer, an inside surface of said floating layer being in contact with an outside surface of said guard ring layer, and said floating layer reaching an outer surface of said semiconductor layer, wherein said guard ring is set to a maximum potential of said integrated circuit, and wherein, when said unpackaged semiconductor integrated circuit device is used, said outer surface of said semiconductor layer is exposed to said solution.

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