Reduced capacity carrier, transport, load port, buffer system

• US 20080063496A1
• Filed: 08/13/2007
• Published: 03/13/2008
• Est. Priority Date: 11/07/2005
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: May, Robert, Bufano, Michael, Hofmeister, Christopher, Gilchrist, Ulysses, Babbs, Daniel, Fosnight, William
• Granted Patent: US 8,272,827 B2
• Time in Patent Office: Days
• US Class Current: 414/331.01
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67376 characterised by sealing arrangements
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier
• CPC Class Codes: H01L 21/67706 Mechanical details, e.g. roller, belt H01L21/67709 takes precedence
• CPC Class Codes: H01L 21/67715 Changing the direction of the conveying path
• CPC Class Codes: H01L 21/67724 by means of a cart or a vehicule
• CPC Class Codes: H01L 21/67727 using a general scheme of a conveying path within a factory
• CPC Class Codes: H01L 21/6773 Conveying cassettes, containers or carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67757 vertical transfer of a batch of workpieces
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67775 Docking arrangements

Abstract

In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

Claims

1. A semiconductor workpiece processing system comprising:

at least one processing tool for processing semiconductor workpieces;

a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool;

a first transport section elongated and defining a travel direction, and having parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool, the container being in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section; and

a second transport section connected to the at least one process tool for transporting the container to and from the at least one processing tool, the second transport section being separate and distinct from the first transport section and interfacing the first transport section for loading and unloading the container to and from the parts of the first transport section.

2. The system according to claim 1, wherein the second transport section is connected to the at least one processing tool for loading and unloading the container to and from the at least one processing tool.

3. The system according to claim 1, wherein the first transport section is a mass transport system with a distributed drive arranged to support and transport containers without transport vehicles, and the second transport section is a vehicle based system having a transport vehicle capable of holding and moving the container.

4. The system according to claim 1, wherein the second transport section comprises a transport vehicle capable of holding and transporting the container in a travel direction defined by the second transport system, the transport vehicle being arranged to load and unload the container to and from the first transport system.

5. The system according to claim 4, wherein the second transport section has a drive system arranged so that the transport vehicle of the second transport section is capable of travel in at least two travel directions angled relative to each other.

6. A semiconductor workpiece processing system comprising:

at least one processing tool for processing semiconductor workpieces;

a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool;

a first transport section elongated and defining a travel direction, and having parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool, the container travelling at a substantially constant rate in the travel direction, when supported by the first transport section; and

a second transport section connected to the at least one process tool and first transport section interfacing the container between the at least one processing tool and first transport section, the second transport section being distinct from the first transport section and interfacing the first transport section for loading and unloading the container to and from the parts of the first transport section;

wherein the constant rate of travel of the container is substantially independent of an interface rate between the second transport section and the at least one processing tool.