HIGH RESOLUTION SPATIAL LIGHT MODULATION
First Claim
1. A method for making a spatial light modulator, the method comprising:
- forming a control substrate;
forming a first support post and a second support post on the substrate;
forming a layer of amorphous silicon by vapor deposition of amorphous silicon on the substrate, wherein a thickness of the layer is controlled by controlling the vapor deposition; and
patterning the layer to form a bottom layer of a micro mirror, the bottom layer including a hinge member about which the micro mirror is configured to tilt, the hinge member having a first end secured to the first support post and a second end secured to the second support post.
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Accused Products
Abstract
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.
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Citations
7 Claims
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1. A method for making a spatial light modulator, the method comprising:
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forming a control substrate;
forming a first support post and a second support post on the substrate;
forming a layer of amorphous silicon by vapor deposition of amorphous silicon on the substrate, wherein a thickness of the layer is controlled by controlling the vapor deposition; and
patterning the layer to form a bottom layer of a micro mirror, the bottom layer including a hinge member about which the micro mirror is configured to tilt, the hinge member having a first end secured to the first support post and a second end secured to the second support post. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification