Immersion exposure apparatus and immersion exposure method, and device manufacturing method
First Claim
1. An immersion type exposure apparatus for exposing a substrate with an exposure beam, comprising:
- an optical member from which the exposure beam is emitted;
a first movable member that is movable while holding a substrate, in a predetermined region including a first region including a position facing the optical member and a second region different from the first region;
a second movable member that is movable while holding a substrate independently from the first movable member, in a predetermined region including the first region and the second region;
a first connection member that is releasably and alternately connected with the first movable member and the second movable member, and allows the movement of one of the first and the second movable members in the first region;
a second connection member that is releasably and alternately connected with the first movable member and the second movable member, and allows the movement of the other one of the first and the second movable members in the second region;
a third movable member that is provided at the first connection member and has a surface between which and the optical member can be held a liquid;
a first driving device that moves the first connection member, a second driving device that moves the second connection member; and
a third driving device that moves the third movable member with respect to the first connection member substantially parallel to the surface of the third movable member;
wherein at least one of the first movable member, the second movable member,and the third movable member is moved to the position facing the optical member so that a beam path on the emitting side of the optical member is kept filled with a liquid.
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Accused Products
Abstract
An immersion type exposure apparatus comprises: an optical member from which an exposure beam is emitted; a first movable member that is movable while holding a substrate, in a predetermined region including a first region including a position facing the optical member and a second region different from the first region; a second movable member that is movable while holding the substrate independently from a first movable member, in a predetermined region including the first region and the second region; a first connection member that is releasably and alternately connected with the first movable member and the second movable member, and moves one movable member in the first region; a second connection member that is releasably and alternately connected with the first movable member and the second movable member, and moves the other movable member in the second region; and a third movable member that is provided on the first connection member and is movable to a position facing the optical member, and at least one of the first movable member, the second movable member, and the third movable member is moved to the position facing the optical member so that a beam path on the emitting side of the optical member is kept filled with a liquid.
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Citations
25 Claims
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1. An immersion type exposure apparatus for exposing a substrate with an exposure beam, comprising:
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an optical member from which the exposure beam is emitted; a first movable member that is movable while holding a substrate, in a predetermined region including a first region including a position facing the optical member and a second region different from the first region; a second movable member that is movable while holding a substrate independently from the first movable member, in a predetermined region including the first region and the second region; a first connection member that is releasably and alternately connected with the first movable member and the second movable member, and allows the movement of one of the first and the second movable members in the first region; a second connection member that is releasably and alternately connected with the first movable member and the second movable member, and allows the movement of the other one of the first and the second movable members in the second region; a third movable member that is provided at the first connection member and has a surface between which and the optical member can be held a liquid; a first driving device that moves the first connection member, a second driving device that moves the second connection member; and a third driving device that moves the third movable member with respect to the first connection member substantially parallel to the surface of the third movable member; wherein at least one of the first movable member, the second movable member, and the third movable member is moved to the position facing the optical member so that a beam path on the emitting side of the optical member is kept filled with a liquid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 19)
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13. An immersion type exposure apparatus for exposing a substrate with an exposure beam, comprising:
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an optical member from which the exposure beam is emitted; a movable member that has a holder portion for holding the substrate and a flat portion, and is movable with respect to the optical member; a first movement system that has a connection member connected to the movable member, the movable member moving by the movement of the connection member; a liquid holding member that has a surface capable of holding a liquid in a state of facing the optical member, and is provided at the connection member, and a second movement system that moves the liquid holding member with respect to the connection member substantially parallel to the surface of the liquid holding member to change the relative position between the movable member and the liquid holding member. - View Dependent Claims (14, 15, 16, 17, 18)
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20. An immersion type exposure method for exposing a substrate with an exposure beam via an optical member, comprising:
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loading a substrate onto a first movable member that is movable in a predetermined region including a first region including a position facing the optical member and a second region different from the first region, loading a substrate onto a second movable member that is movable independently from the first movable member, in a predetermined region including the first region and the second region; moving the first connection member connected to the first movable member, and thereby moving the first movable member, so as to execute an exposure process of the substrate held on the first movable member; moving the second connection member connected to the second movable member, and thereby moving the second movable member, so as to execute a measurement process of the substrate held on the second movable member, in parallel with at least a part of the exposure process; and after the exposure process and the measurement process are completed, moving the first movable member, the second movable member, and a third movable member provided at the first connection member so as to change a first state where the first movable member and the optical member are opposed, through a second state where the optical member and the third movable member are opposed, to a third state where the second movable member and the optical member are opposed, so that a beam path on the emitting side of the optical member is kept filled with liquid, wherein the third movable member is moved with respect to the first connection member in the second state. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification