BEAM SPLITTER APPARATUS AND SYSTEM
First Claim
Patent Images
1. A system comprising:
- a light source to provide an incident light beam; and
a beam splitter apparatus to split the incident light beam into at least (2n−
1) beamlets, wherein the beam splitter apparatus comprises;
a beam splitter; and
(2n−
2) prisms in optical contact with the beam splitter.
1 Assignment
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Accused Products
Abstract
A beam splitter apparatus comprises a beam splitter and a plurality of prisms disposed about the beam splitter. The beam splitter apparatus is configured to split an incident laser beam into a plurality of beamlets exhibiting substantially equal energy and traversing substantially equal optical path lengths through the beam splitter apparatus.
58 Citations
28 Claims
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1. A system comprising:
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a light source to provide an incident light beam; and a beam splitter apparatus to split the incident light beam into at least (2n−
1) beamlets, wherein the beam splitter apparatus comprises;a beam splitter; and (2n−
2) prisms in optical contact with the beam splitter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus comprising:
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a beam splitter configured to split an incident light beam into a first beamlet and a second beamlet; a first prism member configured to reflect the first beamlet into the beam splitter, wherein the first beamlet traverses the beam splitter and splits into a third beamlet and a fourth beamlet; a second prism member configured to reflect the second beamlet into the beam splitter, wherein the second beamlet traverses the beam splitter and splits into a fifth and sixth beamlet; a third prism member configured to reflect the third and fifth beamlets into the beam splitter; and a fourth prism member configured to reflect the fourth and sixth beamlets into the beam splitter, wherein the first, second, third, and fourth prisms are arranged to achieve a predetermined path difference between the third, fourth, fifth, and sixth beamlets. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An optical apparatus for splitting an incident light beam into a plurality of beamlets, the optical apparatus comprising:
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a first cube beam splitter comprising a first splitter portion; a second cube beam splitter comprising a second splitter portion; a third cube beam splitter comprising a third splitter portion; a first pentaprism disposed between the first and second cube beam splitters; a second pentaprism disposed between the first and second beam splitters and opposing the first pentaprism; a third pentaprism disposed between the second and third beam splitters; and a fourth pentaprism disposed between the second and third beam splitters and opposing the third pentaprism. - View Dependent Claims (24, 25)
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26. A system comprising:
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a light source to provide an incident light beam; and a beam splitter apparatus to split the incident light beam into a plurality of beamlets separated from each other by a pitch P, wherein the beam splitter apparatus comprises; a beam splitter, wherein the beam splitter splits the incident light beam S number of times; a first set of prisms disposed along a first axis, wherein each of the prisms of the first set of prisms contacts the beam splitter along dimension LZ and an nth prism of the first set of prisms is a distance Zn from a first reference point, where Zn is calculated according to a first formula; and a second set of prisms disposed along a second axis that is orthogonal to the first axis, wherein each of the prisms of the second set of prisms contacts the beam splitter along dimension Lx and an nth prism of the second set of prisms is a distance Xn from a second reference point, where Xn is calculated according to a second formula; - View Dependent Claims (27, 28)
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Specification