MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS
3 Assignments
0 Petitions
Accused Products
Abstract
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
14 Citations
32 Claims
-
1-18. -18. (canceled)
-
19. A method of fabricating a micro-electromechanical system (MEMS) current &
- magnetic field sensor comprising;
providing a first substrate having a front side, a back side, and a first electrode;
forming a cavity through the back side of the first substrate to produce a membrane on the front side;
providing a second substrate having a second electrode; and
aligning the first and second substrates such that as the membrane is deflected into the cavity, a capacitance defined between the first and second electrodes changes. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
- magnetic field sensor comprising;
-
28. A method of fabricating a micro-electromechanical system (MEMS) current &
- magnetic field sensor comprising;
providing a first substrate having a front side and a back side;
forming a cavity through the back side of the first substrate to produce a membrane on the front side;
providing a second substrate; and
aligning the first and second substrates such that as the membrane is deflected into the cavity, a capacitance defined between the first and second substrates changes providing an indication of a current in a current carrying conductor. - View Dependent Claims (29, 30, 31, 32)
- magnetic field sensor comprising;
Specification