Method and apparatus for semiconductor device and semiconductor memory device
First Claim
Patent Images
1. A method comprising:
- providing a first conductive region;
arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region;
arranging a third region adjacent to and insulated from the second conductive region; and
adjusting mechanical stress to at least one of the first conductive region and the second conductive region.
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Abstract
A method comprises providing a first conductive region, arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region, arranging a third region adjacent to and insulated from the second conductive region, and adjusting mechanical stress to at least one of the first conductive region and the second conductive region.
103 Citations
21 Claims
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1. A method comprising:
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providing a first conductive region;
arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region;
arranging a third region adjacent to and insulated from the second conductive region; and
adjusting mechanical stress to at least one of the first conductive region and the second conductive region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method comprising,
providing a first conductive region having charge carriers for ballistic transport; -
arranging a second conductive region adjacent to and insulated from the first conductive region to control the ballistic transport of the charge carriers;
arranging a third region adjacent to and insulated from the second conductive region, wherein the third region receives the charge carriers with an injection efficiency for the ballistic transport; and
adjusting mechanical stress in at least one of the first conductive region and the second conductive region to enhance the injection efficiency of the ballistic transport. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method comprising:
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providing a first conductive region having a population of charge carriers;
arranging a second conductive region adjacent to and insulated from the first conductive region for controlling transport of charge carriers from the first conductive region;
arranging a third region adjacent to and insulated from the second conductive region, wherein the third region receives the charge carriers; and
adjusting mechanical stress in at least one of the first conductive region and the second conductive region. - View Dependent Claims (20, 21)
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Specification