High power laser flat panel workpiece treatment system controller

US 20080071403A1
Filed: 05/21/2007
Published: 03/20/2008
Est. Priority Date: 06/02/2006
Status: Active Grant

First Claim

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1. A pulsed DUV workpiece treatment apparatus delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, comprising a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis comprising:

a laser controller;

a work stage controller;

a system controller receiving process recipe control demands from a customer recipe control command generator and providing control signals to the laser controller and the workstage controller, comprising;

a database driven process controller comprising;

a database containing generic process command steps selectable by a user through an external process user interface.

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Abstract

A pulsed DUV workpiece treatment apparatus and method for delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, which may comprise a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis is disclosed, which may comprise: a laser controller; a work stage controller; a system controller receiving process recipe control demands from a customer recipe control command generator and providing control signals to the laser controller and the workstage controller, which may comprise: a database driven process controller which may comprise: a database containing generic process command steps selectable by a user through an external process user interface.

Citations

128 Claims

1. A pulsed DUV workpiece treatment apparatus delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, comprising a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis comprising:
- a laser controller;
  
  a work stage controller;
  
  a system controller receiving process recipe control demands from a customer recipe control command generator and providing control signals to the laser controller and the workstage controller, comprising;
  
  a database driven process controller comprising;
  
  a database containing generic process command steps selectable by a user through an external process user interface.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115)
- - 2. The apparatus of claim 1 further comprising:
    - process control customization from user to user.
  - 3. The apparatus of claim 1 further comprising:
    - an interpreter converting process command steps selected through the external process user interface to a respective generic script or scripts.
  - 4. The apparatus of claim 2 further comprising:
    - an interpreter converting process command steps selected through the external process user interface to a respective generic script or scripts.
  - 5. The apparatus of claim 1 further comprising:
    - a work flow engine identifying to the user process command steps that are selectable by the user from the OEM database based on tasks stored in the OEM database.
  - 6. The apparatus of claim 2 further comprising:
    - a work flow engine identifying to the user process command steps that are selectable by the user from the OEM database based on tasks stored in the OEM database.
  - 7. The apparatus of claim 3 further comprising:
    - a work flow engine identifying to the user process command steps that are selectable by the user from the OEM database based on tasks stored in the OEM database.
  - 8. The apparatus of claim 4 further comprising:
    - a work flow engine identifying to the user process command steps that are selectable by the user from the OEM database based on tasks stored in the OEM database.
  - 9. The apparatus of claim 1 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 10. The apparatus of claim 2 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 11. The apparatus of claim 3 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 12. The apparatus of claim 4 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 13. The apparatus of claim 5 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 14. The apparatus of claim 6 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 15. The apparatus of claim 7 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 16. The apparatus of claim 8 further comprising:
    - a process server executing a command to a controller of a device from a group comprising the laser controller and the work stage controller;
      
      a GUI client inputting recipe definitions from the user and sending user commands to the process server.
  - 17. The apparatus of claim 9 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 18. The apparatus of claim 10 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 19. The apparatus of claim 11 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 20. The apparatus of claim 12 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 21. The apparatus of claim 13 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 22. The apparatus of claim 14 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 23. The apparatus of claim 15 further comprising:
    - the GUI client comprising a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 24. The apparatus of claim 16 further comprising:
    - the GUI client comprising;
      
      a display displaying the status of at least one device from a group comprising the laser and work stage and/or the status of the crystallization process on the workpiece.
  - 25. The apparatus of claim 17 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 26. The apparatus of claim 18 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 27. The apparatus of claim 19 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 28. The apparatus of claim 20 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 29. The apparatus of claim 21 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 30. The apparatus of claim 22 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 31. The apparatus of claim 23 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 32. The apparatus of claim 24 further comprising:
    - the GUI client communicates with a manufacturing execution system interface via an interface.
  - 33. The apparatus or claim 25 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 34. The apparatus of claim 26 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 35. The apparatus of claim 27 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 36. The apparatus of claim 28 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 37. The apparatus of claim 29 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 38. The apparatus of claim 30 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 39. The apparatus of claim 31 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 40. The apparatus of claim 32 further comprising:
    - an OEM read only database containing read-only task definitions supplied by the OEM;
      
      a master system controller read-write database containing user provided recipe definitions.
  - 41. The apparatus of claim 33 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 42. The apparatus of claim 34 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 43. The apparatus of claim 35 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 44. The apparatus of claim 36 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 45. The apparatus of claim 37 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 46. The apparatus of claim 38 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the process server during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 47. The apparatus of claim 39 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the driver controller during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 48. The apparatus of claim 40 further comprising:
    - the OEM database contains generic task definitions in the form of macros or scripts useable by the driver controller during process control;
      
      a command interpreter combining a user input parameter stored in the MSC database with a generic command from the OEM database.
  - 49. The apparatus of claim 41 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 50. The apparatus of claim 42 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 51. The apparatus of claim 43 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 52. The apparatus of claim 44 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 53. The apparatus of claim 45 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 54. The apparatus of claim 46 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 55. The apparatus of claim 47 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 56. The apparatus of claim 48 further comprising:
    - the input parameter was previously stored in the MSC database and the generic command is contained in a script in the OEM database.
  - 57. The apparatus of claim 41 further comprising:
    - a plurality of process control subsystems in communication with the process server, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 58. The apparatus of claim 42 further comprising:
    - a plurality of process control subsystems in communication with the process server, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 59. The apparatus of claim 43 further comprising:
    - a plurality of process control subsystems in communication with the process server, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serial zing access to the respective subsystem.
  - 60. The apparatus of claim 44 further comprising:
    - a plurality of process control subsystems in communication with the process server, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 61. The apparatus of claim 45 further comprising:
    - a plurality of process control subsystems in communication with the process server, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 62. The apparatus of claim 46 further comprising:
    - a plurality of process control subsystems in communication with the driver controller, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 63. The apparatus of claim 47 further comprising:
    - a plurality of process control subsystems in communication with the driver controller, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 64. The apparatus of claim 48 further comprising:
    - a plurality of process control subsystems in communication with the driver controller, each subsystem comprising a message queue and message loop;
      
      a message pump associated with each message queue and message loop serializing access to the respective subsystem.
  - 65. The apparatus of claim 49 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 66. The apparatus of claim 50 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 67. The apparatus of claim 51 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 68. The apparatus of claim 52 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 69. The apparatus of claim 53 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 70. The apparatus of claim 54 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 71. The apparatus of claim 55 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 72. The apparatus of claim 56 further comprising:
    - a device interface in communication with at least one device from a group comprising the laser and the work stage, utilizing a language converter converting the communication from a neutral language format utilized within the command interpreter to a device specific device language format.
  - 100. The apparatus of claim 9 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 101. The apparatus of claim 10 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 102. The apparatus of claim 11 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 103. The apparatus of claim 12 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 104. The apparatus of claim 13 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 105. The apparatus of claim 14 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 106. The apparatus of claim 15 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 107. The apparatus of claim 16 further comprising:
    - the GUI client storing recipe definitions as parameters in the MSC database prior to sending user commands to the process server.
  - 108. The apparatus of claim 57 further comprising:
    - a message queue and a message loop.
  - 109. The apparatus of claim 58 further comprising:
    - a message queue and a message loop.
  - 110. The apparatus of claim 59 further comprising:
    - a message queue and a message loop.
  - 111. The apparatus of claim 60 further comprising:
    - a message queue and a message loop.
  - 112. The apparatus of claim 61 further comprising:
    - a message queue and a message loop.
  - 113. The apparatus of claim 62 further comprising:
    - a message queue and a message loop.
  - 114. The apparatus of claim 63 further comprising:
    - a message queue and a message loop.
  - 115. The apparatus of claim 64 further comprising:
    - a message queue and a message loop.

73. A pulsed DUV workpiece treatment apparatus delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, comprising a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis comprising:
- a laser controller;
  
  a work stage controller;
  
  a system controller running a respective task in a separate respective process in order to code a task as a single thread or as multiple non-reentrant threads.
- View Dependent Claims (74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87)
- - 74. The apparatus of claim 73 further comprising:
    - the respective task comprising core tasks each run in a respective thread inside a single process as a single thread.
  - 75. The apparatus of claim 73 further comprising:
    - each thread having a respective message pump making access to a respective task sequential and non-blocking.
  - 76. The apparatus of claim 74 further comprising:
    - each thread having a respective message pump making access to a respective task sequential and non-blocking.
  - 77. The apparatus of claim 75 further comprising:
    - the message pump comprising;
      
      a message queue and a message loop.
  - 78. The apparatus of claim 73 further comprising:
    - the system processor processing errors.
  - 79. The apparatus of claim 74 further comprising:
    - the system processor processing errors.
  - 80. The apparatus of claim 75 further comprising:
    - the system processor processing errors.
  - 81. The apparatus of claim 76 further comprising:
    - the system controller processing errors.
  - 82. The apparatus of claim 77 further comprising:
    - the system controller processing errors.
  - 83. The apparatus of claim 78 further comprising:
    - the system processor message is processed using the message pump.
  - 84. The apparatus of claim 79 further comprising:
    - the system processor message is processed using the message pump.
  - 85. The apparatus of claim 80 further comprising:
    - the system processor message is processed using the message pump.
  - 86. The apparatus of claim 81 further comprising:
    - the system processor message is processed using the message pump.
  - 87. The apparatus of claim 82 further comprising:
    - the system processor message is processed using the message pump.

88. A pulsed DUV workpiece treatment apparatus delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, comprising a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis comprising:
- a laser controller;
  
  a work stage controller;
  
  a plurality of process devices controlled by a system device manager utilizing at least two separately functioning threads one of which comprises a device interface to each of the plurality of process devices.
- View Dependent Claims (89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 128)
- - 89. The apparatus of claim 88 further comprising:
    - the two separately functioning threads comprising a control thread associated with all of the respective devices and a diagnostic thread associated with all of the respective devices.
  - 90. The apparatus of claim 88 further comprising:
    - each separately functioning thread comprising a separate communication channel.
  - 91. The apparatus of claim 89 further comprising:
    - each separately functioning thread comprising a separate communication channel.
  - 92. The apparatus of claim 88 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 93. The apparatus of claim 89 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 94. The apparatus of claim 90 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 95. The apparatus of claim 91 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 96. The apparatus of claim 92 further comprising:
    - the device commands corresponding to high level actions.
  - 97. The apparatus of claim 93 further comprising:
    - the device commands corresponding to high level actions.
  - 98. The apparatus of claim 94 further comprising:
    - the device commands corresponding to high level actions.
  - 99. The apparatus of claim 95 further comprising:
    - the device commands corresponding to high level actions.
  - 116. The apparatus of claim 88 further comprising:
    - the at least two separately functioning threads comprising one or more separately functioning threads each as a separate device interface to a respective one of the plurality of process devices.
  - 117. The apparatus of claim 116 further comprising:
    - the at least two separately functioning threads comprising a respective control thread associated with the respective device and a respective diagnostic thread associated with the respective device.
  - 118. The apparatus of claim 116 further comprising:
    - each separately functioning thread comprising a separate communication channel.
  - 119. The apparatus of claim 117 further comprising:
    - each separately functioning thread comprising a separate communication channel.
  - 120. The apparatus of claim 116 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 121. The apparatus of claim 117 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 122. The apparatus of claim 118 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 123. The apparatus of claim 119 further comprising:
    - the system controller utilizing generic device commands independently of the device types.
  - 124. The apparatus of claim 120 further comprising:
    - the device commands corresponding to high level actions.
  - 125. The apparatus of claim 121 further comprising:
    - the device commands corresponding to high level actions.
  - 126. The apparatus of claim 122 further comprising:
    - the device commands corresponding to high level actions.
  - 128. The apparatus of claim 123 further comprising:
    - the device commands corresponding to high level actions.

127. An apparatus comprising:
- database driven process server comprising;

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Current Assignee
Cymer Incorporated (ASML Holding NV)
Original Assignee
Cymer Incorporated (ASML Holding NV)
Inventors
Conway, Joseph, Sharma, Yogesh

Granted Patent

US 7,848,835 B2
Time in Patent Office

Days
Field of Search
US Class Current

700/97
CPC Class Codes

B23K 26/064   by means of optical element...

C30B 1/02   by thermal treatment, e.g. ...

C30B 29/06   Silicon

C30B 33/02   Heat treatment C30B33/04, C...

C30B 35/00   Apparatus not otherwise pro...

High power laser flat panel workpiece treatment system controller

First Claim

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High power laser flat panel workpiece treatment system controller

First Claim

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Abstract

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