Micromachined artificial haircell
First Claim
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1. A micromachined artificial sensor comprising:
- a support coupled to and movable with respect to a substrate;
a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support;
a strain detector disposed with respect to said support to detect movement of said support.
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Abstract
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
47 Citations
20 Claims
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1. A micromachined artificial sensor comprising:
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a support coupled to and movable with respect to a substrate;
a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support;
a strain detector disposed with respect to said support to detect movement of said support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A micromachined sensing apparatus comprising:
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a silicon substrate;
a silicon support coupled to and movable with respect to said substrate, wherein a cavity is defined beneath said support;
a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support;
a strain detector disposed with respect to said support to detect movement of said support. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A micromachined artificial sensor comprising:
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silicon-based movable means for support;
polymer high-aspect ratio means for receiving a force and coupling the force to said movable means, said high-aspect ratio means being mounted to and extending generally out of plane of said movable means; and
means for detecting strain based on displacement of said high-aspect ratio means.
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Specification