CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION THEREOF
First Claim
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1. A method for forming a structure of a desired cross-section on a substrate, the method comprising:
- providing a seed structure on the substrate, wherein the seed structure comprises at least one support layer having a geometric shape related to the desired cross-section of the structure; and
growing the structure by supplying at least one precursor constituent to the seed structure, wherein the desired cross-section of the structure is defined by the geometric shape of the at least one support layer.
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Abstract
A method for forming a structure of a desired cross-section on a substrate is provided. The method provides a seed structure comprising at least one support layer on the substrate. The support layer has a geometric shape related to the desired cross-section of the structure and is diffusive to a precursor constituent. The method further includes growing the structure by supplying at least one precursor constituent on the substrate. The desired cross-section of the structure is defined by the geometric shape of at least one support layer.
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22 Claims
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1. A method for forming a structure of a desired cross-section on a substrate, the method comprising:
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providing a seed structure on the substrate, wherein the seed structure comprises at least one support layer having a geometric shape related to the desired cross-section of the structure; and growing the structure by supplying at least one precursor constituent to the seed structure, wherein the desired cross-section of the structure is defined by the geometric shape of the at least one support layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for forming a structure of a desired cross-section on a substrate wherein, the substrate is surrounded by at least one precursor constituent, the method comprising:
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providing a seed structure on the substrate, the seed structure comprising; at least one covering layer adsorbing the precursor constituent; and at least one support layer having a geometric shape related to the desired cross-section of the structure; and forming the structure by supplying at least one of the precursor constituent and the adsorbed precursor constituent to the seed structure, wherein the desired cross-section of the structure is defined by the geometric shape of the at least one support layer. - View Dependent Claims (16, 17, 18)
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19. A structure of a desired cross-section on a substrate prepared by a process comprising:
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providing a seed structure on the substrate, wherein the seed structure comprises at least one support layer having a geometric shape related to the desired cross-section of the structure; and growing the structure by supplying at least one precursor constituent to the seed structure, wherein the desired cross-section of the structure is defined by the geometric shape of the at least one support layer. - View Dependent Claims (20, 21, 22)
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Specification