SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
First Claim
1. A reaction chamber apparatus comprising a vertically movable heater-susceptor coupled to an annular flow ring configured as a gas conduit and having an outlet port extending below a bottom of a wafer transport slot valve of the reaction chamber apparatus when the heater-susceptor is in a processing position.
1 Assignment
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Accused Products
Abstract
A reaction chamber apparatus includes a vertically movable heater-susceptor with an attached annular attached flow ring that performs as a gas conduit. The outlet port of the flow ring extends below the bottom of a wafer transport slot valve when the susceptor is in its process (higher) position, while the gas conduit formed by the flow ring has an external surface at its edge that isolates the outer space of the reactor above the wafer from the confined reaction space. In some cases, the outer edge of the gas conduit is in proximity to a ring attached to the reactor lid and, together, the ring and conduit act as a tongue-in-groove (TIG) configuration. In some cases, the TIG design may have a staircase contour, thereby limiting diffusion-backflow of downstream gases to the outer space of the reactor.
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Citations
20 Claims
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1. A reaction chamber apparatus comprising a vertically movable heater-susceptor coupled to an annular flow ring configured as a gas conduit and having an outlet port extending below a bottom of a wafer transport slot valve of the reaction chamber apparatus when the heater-susceptor is in a processing position.
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2. A reaction chamber apparatus comprising a heater-susceptor coupled to an annular flow ring conduit at a perimeter of the heater-susceptor, the flow ring conduit having an external surface at its edge, the external surface configured to isolate an outer space of the reactor both above and below a wafer position when the heater-susceptor is in a processing position.
- 3. A reaction chamber apparatus comprising a heater-susceptor coupled to an annular flow ring conduit at a perimeter of the heater-susceptor, the annular flow ring defined by inner and outer members and configured to isolate an outer space of the reaction chamber above a wafer position from a confined reaction space of the reaction chamber when the heater-susceptor is in a processing position, in which instance the outer member of the annular flow ring is in proximity with a second annular ring attached to a lid of the reactor, the outer member of the annular flow ring and the second annular ring forming a tongue-in-groove (TIG) configuration.
- 11. A reaction chamber apparatus comprising a vertically movable susceptor coupled to an annular flow ring conduit at a perimeter of the susceptor, said annular flow ring conduit configured to pass reaction gas effluent to a downstream pump that is located off-axis with respect to an axi-centric center of the reaction chamber.
Specification