Electromagnetic shielding using through-silicon vias
First Claim
Patent Images
1. An integrated circuit structure comprising:
- a semiconductor substrate;
a first integrated circuit in the semiconductor substrate;
a second integrated circuit in the semiconductor substrate; and
an isolation structure in a direct path between the first and the second integrated circuits, wherein the isolation structure comprises a through-silicon via.
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Abstract
An isolation structure for electromagnetic interference includes a semiconductor substrate, a first integrated circuit in the semiconductor substrate, a second integrated circuit in the semiconductor substrate, and an isolation structure in a direct path between the first and the second integrated circuits, wherein the isolation structure comprises a through-silicon via.
119 Citations
20 Claims
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1. An integrated circuit structure comprising:
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a semiconductor substrate; a first integrated circuit in the semiconductor substrate; a second integrated circuit in the semiconductor substrate; and an isolation structure in a direct path between the first and the second integrated circuits, wherein the isolation structure comprises a through-silicon via. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An integrated circuit structure comprising:
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a semiconductor substrate; a first circuit region in the semiconductor substrate; a second circuit region in the semiconductor substrate; and an isolation structure extending from a top surface of the semiconductor substrate to a bottom surface of the semiconductor substrate, wherein the isolation structure comprises at least a portion separating the first circuit region and the second circuit region, and wherein the isolation structure is substantially longer than each of the first and the second circuit regions. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An integrated circuit structure comprising:
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a semiconductor substrate; a circuit region in the semiconductor substrate; and an isolation structure enclosing the circuit region, wherein the isolation structure comprises; at least one through-silicon via extending from a top surface of the semiconductor substrate to a bottom surface of the semiconductor substrate; a backside plate on a bottom surface of the semiconductor substrate, wherein the backside plate is electrically connected to the at least one through-silicon via; and a metal cap in a metallization layer and over the circuit region, wherein the metal cap is electrically connected to the at least one through-silicon via. - View Dependent Claims (17, 18, 19, 20)
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Specification