Illumination optical system, exposure apparatus, and exposure method
First Claim
1. A method for adjusting an illumination optical system that illuminates an illuminated surface with light including a predetermined polarized state supplied from a light source, comprising:
- setting a quarter-wave plate in an illumination light path of the illumination optical system such that a crystal optic axis of the quarter-wave plate is set at a predetermined angular position, and sets a half-wave plate in the illumination light path such that a crystal optic axis of the half-wave plate is set at a predetermined angular positioned, wherein based on a result of detection of the polarized state of the light in the light path between a polarized state switching device and the illuminated surface when the crystal optic axes of the quarter-wave plate and the half-wave plate are respectively changed, the wavelength plate setting step sets the crystal optic axis of the quarter-wave plate at a desired position for converting incident elliptically polarized light into linearly polarized light, and the crystal optic axis of the half-wave plate at a standard position for converting incident linearly polarized light into linearly polarized light that includes a polarized plane in a predetermined direction.
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Abstract
An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.
34 Citations
18 Claims
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1. A method for adjusting an illumination optical system that illuminates an illuminated surface with light including a predetermined polarized state supplied from a light source, comprising:
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setting a quarter-wave plate in an illumination light path of the illumination optical system such that a crystal optic axis of the quarter-wave plate is set at a predetermined angular position, and sets a half-wave plate in the illumination light path such that a crystal optic axis of the half-wave plate is set at a predetermined angular positioned, wherein based on a result of detection of the polarized state of the light in the light path between a polarized state switching device and the illuminated surface when the crystal optic axes of the quarter-wave plate and the half-wave plate are respectively changed, the wavelength plate setting step sets the crystal optic axis of the quarter-wave plate at a desired position for converting incident elliptically polarized light into linearly polarized light, and the crystal optic axis of the half-wave plate at a standard position for converting incident linearly polarized light into linearly polarized light that includes a polarized plane in a predetermined direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification