SILICON CONDENSER MICROPHONE
First Claim
1. A silicon condenser microphone comprising:
- a silicon substrate defining an air chamber;
a back plate mounted on the silicon substrate, the back plate comprising at least one acoustic aperture defined therein and a support device formed thereon;
a diaphragm arranged between the silicon substrate and the back plate so that an effective area thereof is determined by the support device; and
a suspension device arranged between the diaphragm and the silicon substrate so that lateral movement of the diaphragm is prevented while vertical movement of the diaphragm is allowed;
wherein an edge of the diaphragm is abutted against the support device when the diaphragm is moved towards the back plate.
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Accused Products
Abstract
A silicon condenser microphone includes a silicon substrate defining an air chamber, a back plate mounted on the silicon substrate, a diaphragm arranged between the silicon substrate and the back plate and a suspension device arranged between the diaphragm and the silicon substrate. The back plate includes at least one acoustic aperture defined therein and a support device formed thereon. The diaphragm is arranged between the silicon substrate and the back plate so that an effective area thereof is determined by the support device. The suspension device is arranged between the diaphragm and the silicon substrate so that lateral movement of the diaphragm is prevented while vertical movement of the diaphragm is allowed. An edge of the diaphragm is abutted against the support device when the diaphragm is moved towards the back plate.
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Citations
15 Claims
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1. A silicon condenser microphone comprising:
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a silicon substrate defining an air chamber; a back plate mounted on the silicon substrate, the back plate comprising at least one acoustic aperture defined therein and a support device formed thereon; a diaphragm arranged between the silicon substrate and the back plate so that an effective area thereof is determined by the support device; and a suspension device arranged between the diaphragm and the silicon substrate so that lateral movement of the diaphragm is prevented while vertical movement of the diaphragm is allowed; wherein an edge of the diaphragm is abutted against the support device when the diaphragm is moved towards the back plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A silicon condenser microphone comprising:
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a silicon substrate defining an air chamber; a back plate mounted on the silicon substrate, the back plate comprising at least one acoustic aperture defined therein; a diaphragm arranged between the silicon substrate and the back plate; and a suspension device arranged between the diaphragm and the silicon substrate so that lateral movement of the diaphragm is prevented while vertical movement of the diaphragm is allowed; wherein an edge of the diaphragm is abutted against the support device when the diaphragm is moved towards the back plate. - View Dependent Claims (12, 13, 14, 15)
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Specification