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SILICON CONDENSER MICROPHONE

  • US 20080075308A1
  • Filed: 08/30/2006
  • Published: 03/27/2008
  • Est. Priority Date: 08/30/2006
  • Status: Abandoned Application
First Claim
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1. A silicon condenser microphone comprising:

  • a silicon substrate defining an air chamber;

    a back plate mounted on the silicon substrate, the back plate comprising at least one acoustic aperture defined therein and a support device formed thereon;

    a diaphragm arranged between the silicon substrate and the back plate so that an effective area thereof is determined by the support device; and

    a suspension device arranged between the diaphragm and the silicon substrate so that lateral movement of the diaphragm is prevented while vertical movement of the diaphragm is allowed;

    wherein an edge of the diaphragm is abutted against the support device when the diaphragm is moved towards the back plate.

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