Method of Forming A Metallic Oxide Film Using Atomic Layer Deposition
First Claim
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1. A method of forming a metallic oxide film using Atomic Layer Deposition, the method comprising:
- loading a substrate into a reactor;
supplying a metallic source gas into the reactor and absorbing at least some of the metallic source gas onto the substrate;
purging the remaining metallic source gas that does not react with the substrate; and
supplying plasma of an N-group containing oxide reactant gas into the reactor.
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Abstract
A method of forming a metallic oxide film using atomic layer deposition includes loading a substrate into a reactor, supplying a metallic source gas into the reactor and absorbing the metallic source gas onto the substrate, purging the remaining metallic source gas that does not react, with the substrate, and directly producing plasma of an N-group-containing oxide reactant gas in the reactor.
484 Citations
21 Claims
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1. A method of forming a metallic oxide film using Atomic Layer Deposition, the method comprising:
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loading a substrate into a reactor; supplying a metallic source gas into the reactor and absorbing at least some of the metallic source gas onto the substrate; purging the remaining metallic source gas that does not react with the substrate; and supplying plasma of an N-group containing oxide reactant gas into the reactor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 17)
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15. The method of claim 15, wherein the volume of the inner chamber is about 2000 cc or less.
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16. The method of claim 16, wherein the volume of the inner chamber is about 1000 cc or less.
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18. A method of forming a metallic oxide film using Atomic Layer Deposition, the method comprising;
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loading a substrate into a reactor; supplying a metallic source gas into the reactor and absorbing at least some of the metallic source gas onto the substrate; purging the metallic source gas with an N-group-containing oxide reactant gas; and directly producing plasma of the N-group-containing oxide reactant gas by supplying plasma power to the reactor. - View Dependent Claims (19, 20, 21)
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Specification