Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Layer Deposition
First Claim
1. A method of forming a fine pattern in an integrated circuit substrate, the method comprising:
- sequentially forming a first hard mask layer and a second hard mask layer on the integrated circuit substrate, the second hard mask layer having an etch selectivity with respect to the first hard mask layer;
forming a photoresist pattern on the second hard mask layer, the photoresist pattern having a first line width and a first pitch;
forming a mask material layer on the photoresist pattern and the second hard mask layer by atomic layer deposition, the mask material layer including a material harder than the second hard mask layer;
etching the mask material layer until the photoresist pattern is exposed in order to form a mask pattern on side walls of the photoresist pattern, the mask pattern having a second pitch that is less than the first pitch;
removing the photoresist pattern;
etching the second hard mask layer using the mask pattern to form a second hard mask pattern;
etching the first hard mask layer using the second hard mask pattern as a mask to form a first hard mask pattern; and
etching the integrated circuit substrate using the first hard mask pattern as a mask to form a fine pattern having same pitch as the second pitch.
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Accused Products
Abstract
A fine pattern is formed in an integrated circuit substrate, by forming a sacrificial pattern on the integrated circuit substrate. The sacrificial pattern includes tops and side walls. Atomic layer deposition is then performed to atomic layer deposit a mask material layer on the sacrificial pattern, including on the tops and the side walls thereof, and on the integrated circuit substrate therebetween. The mask material layer that was atomic layer deposited is then etched, to expose the top and the integrated circuit therebetween, such that a mask material pattern remains on the side walls. The sacrificial pattern is then removed, and the integrated circuit substrate is then etched through the mask material pattern that remains.
377 Citations
20 Claims
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1. A method of forming a fine pattern in an integrated circuit substrate, the method comprising:
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sequentially forming a first hard mask layer and a second hard mask layer on the integrated circuit substrate, the second hard mask layer having an etch selectivity with respect to the first hard mask layer; forming a photoresist pattern on the second hard mask layer, the photoresist pattern having a first line width and a first pitch; forming a mask material layer on the photoresist pattern and the second hard mask layer by atomic layer deposition, the mask material layer including a material harder than the second hard mask layer; etching the mask material layer until the photoresist pattern is exposed in order to form a mask pattern on side walls of the photoresist pattern, the mask pattern having a second pitch that is less than the first pitch; removing the photoresist pattern; etching the second hard mask layer using the mask pattern to form a second hard mask pattern; etching the first hard mask layer using the second hard mask pattern as a mask to form a first hard mask pattern; and etching the integrated circuit substrate using the first hard mask pattern as a mask to form a fine pattern having same pitch as the second pitch. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of forming a fine pattern in an integrated circuit substrate, the method comprising:
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forming an insulating layer on the integrated circuit substrate; sequentially forming a first hard mask layer and a second hard mask layer on the insulating layer, the second hard mask layer having an etch selectivity with respect to the first hard mask layer; forming a first photoresist pattern on the second hard mask layer, the first photoresist pattern having a first line width and a first pitch; forming a mask material layer on the first photoresist pattern and the second hard mask layer by atomic layer deposition, the mask material layer including a material harder than the second hard mask layer; etching the mask material layer until the first photoresist pattern is exposed in order to form a mask pattern on side walls of the first photoresist pattern, the mask pattern having a second pitch that is less than the first pitch; etching a portion of the second hard mask layer using the mask pattern; forming a second photoresist pattern on the second hard mask layer, the second photoresist pattern partially exposing the etched portion of the second hard mask layer; etching the partially exposed portion of the second hard mask layer using the second photoresist pattern until the first hard mask layer is exposed, so as to form a second hard mask pattern; etching the first hard mask layer using the second hard mask pattern as a mask to form a first hard mask pattern; and etching the insulating layer using the first hard mask pattern as a mask to form a contact hole. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of forming a fine pattern in an integrated circuit substrate, the method comprising:
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forming a sacrificial pattern on the integrated circuit substrate, the sacrificial pattern including tops and side walls; atomic layer depositing a mask material layer on the sacrificial pattern, including on the tops and the side walls thereof and on the integrated circuit substrate therebetween; etching the mask material layer that was atomic layer deposited to expose the tops and the integrated circuit substrate therebetween, such that a mask material pattern remains on the side walls; removing the sacrificial pattern; and etching the integrated circuit substrate through the mask material pattern that remains. - View Dependent Claims (19, 20)
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Specification