Communication network system

• US 20080078189A1
• Filed: 09/28/2006
• Published: 04/03/2008
• Est. Priority Date: 09/28/2006
• Status: Abandoned Application

• Current Assignee: Sumitomo Heavy Industries Limited
• Original Assignee: Sumitomo Heavy Industries Limited
• Inventors: Ando, Masamichi
• Application Number:
  US11/528,524
• Publication Number:
  US 20080078189A1
• Time in Patent Office: Days
• US Class Current: 62/55.5
• CPC Class Codes: F25B 49/00 Arrangement or mounting of control or safety devices
• CPC Class Codes: F25D 29/001 for cryogenic fluid systems
• CPC Class Codes: G05B 19/4185 characterised by the network communication
• CPC Class Codes: G05B 2219/31207 Master sends global files to autonomous controllers, feedback of process status
• CPC Class Codes: G05B 2219/31229 Supervisor, master, workstation controller, automation, machine control
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

In a communication network system which unifies a system communication network and a master system communication network, each of a plurality of controlled devices is configured to transmit status data to a master controller and receive control data from the master controller so that the controlled device is operated based on the control data. The master controller comprises a control unit configured to receive status data of the controlled devices and transmit control data to the controlled devices, the control unit being configured to transmit the status data to a system controller and receive the control data from the system controller. The system controller comprises a second control unit configured to receive the status data of the controlled devices from the master controller, perform a processing operation based on the status data, and transmit a result of the processing operation to the master controller as the control data.

Claims

1. A communication network system in which a communication network of a system, including a system controller and a plurality of first controlled devices, and a different communication network of a master system, including a master controller and a plurality of second controlled devices, are unified to form a unified communication network,

wherein each of the plurality of first controlled devices is configured to transmit status information of the first controlled device to the master controller, and receive control information of the first controlled device from the master controller, so that the first controlled device is operated based on the received control information,

wherein the master controller comprises a control unit which is configured to receive status information of the plurality of first controlled devices and transmit control information to the plurality of first controlled devices, the control unit being configured to transmit the status information of the plurality of first controlled devices to the system controller and receive the control information of the plurality of first controlled devices from the system controller, and the control unit being configured to transmit control information of the system controller to the system controller and receive system status information of the system controller from the system controller,

wherein the system controller comprises a second control unit which is configured to receive the status information of the plurality of first controlled devices from the master controller, perform a processing operation based on the received status information, and transmit a result of the processing operation to the master controller as the control information of the plurality of first controlled devices, the second control unit being configured to transmit the system status information of the system controller to the master controller, and receive the control information of the system controller from the master controller, so that the system controller is operated based on the received control information.

2. The communication network system of claim 1 wherein the plurality of first controlled devices include a number of cryopumps and a number of compressors, the system controller is a cryopump system controller controlling the plurality of first controlled devices, the first communication network of the system is a communication network of a cryopump system including the cryopump system controller, the cryopumps and the compressors, and the communication network of the cryopump system and the second communication network of the master system are unified to be the unified communication network.

3. The communication network system of claim 2 wherein the cryopump system controller, the cryopumps, and the compressors are arranged on the unified communication network as being slave devices of the master controller.

4. The communication network system of claim 3 wherein the master controller is configured so that the master controller controls directly the plurality of first controlled devices.

5. The communication network system of claim 2 wherein the status information of the plurality of first controlled devices is status information indicating status of the cryopumps and the compressors, the status information being transmitted to the cryopump system controller through the master controller, and the control information being generated by the cryopump system controller and transmitted to the cryopumps and the compressors through the master controller.

6. The communication network system of claim 2 wherein the status information of the plurality of first controlled devices is status information indicating status of the cryopumps and the compressors, said status information being transmitted to the master controller, and the control information being received from the cryopump system controller at the master controller and transmitted from the master controller to the cryopumps and the compressors.

7. The communication network system of claim 2 wherein the status information of the plurality of first controlled devices is status information indicating status of the cryopumps and the compressors, said status information being transmitted to the master controller, and each of the cryopumps and the compressors is operated in accordance with the control information being received from the master controller.

8. The communication network system of claim 2 wherein the status information and the control information are configured to be table-format information which is in conformity with the unified communication network.

9. The communication network system of claim 1 further comprising a common main bus to which the plurality of first controlled devices, the system controller, the plurality of second controlled devices, and the master controller are connected.

10. The communication network system of claim 1 wherein the unified communication network is constructed using one of communication protocols of Devicenet, Ethernet, CC-link, RS-485, and GPIB (general purpose interface bus).