Mechanical pump operating well for a long term and method of manufacturing the same
First Claim
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1. A mechanical pump for exhausting a gas and comprising a gas-exposed region exposed to the gas and an yttria film formed on said gas-exposed region.
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Abstract
A mechanical pump of the present invention is applied to, for example, a screw pump A for exhausting a gas from a processing chamber. The screw pump comprises a gas-exposed region exposed to the gas and an yttria (Y2O3) film formed on the gas-exposed region.
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10 Claims
- 1. A mechanical pump for exhausting a gas and comprising a gas-exposed region exposed to the gas and an yttria film formed on said gas-exposed region.
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