INTEGRATED MAGNETIC FEATURES

• US 20080079530A1
• Filed: 10/02/2006
• Published: 04/03/2008
• Est. Priority Date: 10/02/2006
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Weidman, Timothy W.
• Application Number:
  US11/537,960
• Publication Number:
  US 20080079530A1
• Time in Patent Office: Days
• US Class Current: 336/223
• CPC Class Codes: H01F 2007/068 using printed circuit coils
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H01F 7/08 with armatures

Abstract

The present invention generally relates to the process of forming a magnetic element or magnetic device that may be used to form a component within an integrated circuit device using a combination of electroless plating and various standard semiconductor processing techniques. In one embodiment, a plurality of magnetic devices are formed on a surface of a substrate so that the orientation of features on the surface of the substrate can be ascertained. In one embodiment, the magnetic devices formed on a surface of a substrate are used to physically align a substrate to an external reference having a similar orientation of magnetic elements.

Claims

1. A electromagnet device formed on a surface of a substrate, comprising:

a coil assembly formed in a surface of a substrate, wherein the coil assembly comprises;

a first coil having a conductive region that extends from a first end to a second end, wherein the first coil is formed within a first layer disposed on the surface of the substrate;

a second coil having a conductive region that extends from a first end to a second end, wherein the second coil is formed in a second layer disposed over the first layer; and

an interconnect feature having a conductive region that is in electrical communication with the first end of the first coil and the first end of the second coil;

a magnetic core that has a first end that is in contact with a portion of the first layer and a second end that is in contact with a portion of the second layer and is positioned so that the conductive regions of the first coil and the second coil loop around at least a portion of the length of the magnetic core extending from the first end to the second end, wherein the magnetic core contains a ferromagnetic or ferrimagnetic material that is deposited using an electroless deposition process.

2. The electromagnet device of claim 1, wherein the material from which the first layer and the second layer are formed is selected from a group consisting of silicon, silicon dioxide, fluorosilicate glass, carbon-doped silicon oxides, germanium and silicon nitride.

3. The electromagnet device of claim 1, wherein the material from which the conductive region in the first coil and the conductive region in the second coil is formed is selected from a group consisting of copper (Cu), aluminum (Al), gold (Au), silver (Ag), nickel (Ni), titanium (Ti), tantalum (Ta), cobalt (Co), molybdenum (Mo), ruthenium (Ru), cobalt (Co), rhodium (Rh), iridium (Ir), palladium (Pd), platinum (Pt), tungsten (W), titanium (Ti), titanium nitride (TiN), tantalum (Ta), and tantalum nitride (TaN).

4. The electromagnet device of claim 1, wherein the material from which the magnetic core is formed is selected from a group consisting of cobalt (Co), nickel (Ni) and iron (Fe).

5. The electromagnet device of claim 1, wherein the material from which the magnetic core is formed is selected from a group consisting of cobalt boride (CoB), cobalt phosphide (CoP), nickel boride (NiB), nickel phosphide (NiP), cobalt tungsten phosphide (CoWP), cobalt tungsten boride (CoWB), nickel tungsten phosphide (NiWP), nickel tungsten boride (NiWB), cobalt molybdenum phosphide (CoMoP), cobalt molybdenum boride (CoMoB), nickel molybdenum boride (NiMoB), nickel molybdenum phosphide (NiMoP), nickel rhenium phosphide (NiReP), nickel rhenium boride (NiReB), cobalt rhenium boride (CoReB), and cobalt rhenium phosphide (CoReP).

6. A method of forming an electromagnet device on a surface of a substrate, comprising:

providing a substrate that has a catalytic region exposed on a surface of the substrate;

depositing a first dielectric layer on the surface of the substrate;

forming a lower planar coil in the first dielectric layer, wherein the lower planar coil has conductive region, a first end and a second end;

depositing a second dielectric layer over the first dielectric layer;

forming an upper planar coil having a conductive region, a first end that is connected to the first end of the lower planar coil through the second dielectric layer and a second end, wherein the upper planar coil is formed in a second dielectric layer;

forming hole through the first and second dielectric layers so that one end of the hole is in communication with the catalytic region and the lower and upper planar coils wind around the hole; and

filling the hole with a magnetic material using an electroless deposition process.

7. The method of claim 6, wherein the material from which the first dielectric layer and the second dielectric layer are formed is selected from a group consisting of silicon, silicon dioxide, fluorosilicate glass, carbon-doped silicon oxides, germanium and silicon nitride.

8. The method of claim 6, wherein the material from which the conductive region of the first coil and the second coil is formed is selected from a group consisting of copper (Cu), aluminum (Al), gold (Au), silver (Ag), nickel (Ni), titanium (Ti), tantalum (Ta), cobalt (Co), molybdenum (Mo), ruthenium (Ru), cobalt (Co), rhodium (Rh), iridium (Ir), palladium (Pd), platinum (Pt), tungsten (W), titanium (Ti), titanium nitride (TiN), tantalum (Ta), and tantalum nitride (TaN).

9. The method of claim 6, wherein the magnetic material is selected from a group consisting of cobalt (Co), nickel (Ni) and iron (Fe).

10. The method of claim 6, wherein the magnetic material is selected from a group consisting of cobalt boride (CoB), cobalt phosphide (CoP), nickel boride (NiB), nickel phosphide (NiP), cobalt tungsten phosphide (CoWP), cobalt tungsten boride (CoWB), nickel tungsten phosphide (NiWP), nickel tungsten boride (NiWB), cobalt molybdenum phosphide (CoMoP), cobalt molybdenum boride (CoMoB), nickel molybdenum boride (NiMoB), nickel molybdenum phosphide (NiMoP), nickel rhenium phosphide (NiReP), nickel rhenium boride (NiReB), cobalt rhenium boride (CoReB), and cobalt rhenium phosphide (CoReP).

11. A substrate alignment and positioning feature, comprising:

a first magnetic element positioned on a surface of a substrate, wherein the first magnetic element contains a ferromagnetic or ferrimagnetic material that is disposed within the surface of the substrate;

a second magnetic element positioned on the surface of the substrate, wherein the second magnetic element contains a ferromagnetic or ferrimagnetic material that is disposed within the surface of the substrate and the second magnetic element is positioned a distance from the first element in a direction parallel to the surface of the substrate.

12. The substrate alignment and positioning feature of claim 11, wherein the first and second magnetic elements each further comprise:

a coil assembly formed in the surface of the substrate, wherein the coil assembly comprises;

a first coil having a conductive region that extends from a first end to a second end, wherein the first coil is formed within a first layer disposed on the surface of the substrate;

a second coil having a conductive region that extends from a first end to a second end, wherein the second coil is formed in a second layer disposed over the first layer; and

an interconnect feature having a conductive region that is in electrical communication with the first end of the first coil and the third end of the second coil;

a magnetic core that has a first end that is in contact with a portion of the first layer and a second end that is in contact with a portion of the second layer and is positioned so that the conductive regions of the first coil and the second coil loop around at least a portion of the length of the magnetic core extending from the first end to the second end, wherein the magnetic core contains a ferromagnetic or ferrimagnetic material that is deposited using an electroless deposition process.

13. The substrate alignment and positioning feature of claim 11, wherein the material from which the first and second ferromagnetic materials are formed is selected from a group consisting of cobalt (Co), nickel (Ni) and iron (Fe).

14. The substrate alignment and positioning feature of claim 11, wherein the material from which the first and second ferromagnetic materials are formed is selected from a group consisting of cobalt boride (CoB), cobalt phosphide (CoP), nickel boride (NiB), nickel phosphide (NiP), cobalt tungsten phosphide (CoWP), cobalt tungsten boride (CoWB), nickel tungsten phosphide (NiWP), nickel tungsten boride (NiWB), cobalt molybdenum phosphide (CoMoP), cobalt molybdenum boride (CoMoB), nickel molybdenum boride (NiMoB), nickel molybdenum phosphide (NiMoP), nickel rhenium phosphide (NiReP), nickel rhenium boride (NiReB), cobalt rhenium boride (CoReB), and cobalt rhenium phosphide (CoReP).

15. A method of aligning two or more substrates, comprising:

forming an first alignment feature on a surface of a first substrate comprising;

forming a first magnetic element on a surface of the first substrate using an electroless deposition process, wherein the first magnetic element contains a ferromagnetic material; and

forming a second magnetic element on a surface of the first substrate using an electroless deposition process, wherein the second magnetic element contains a ferromagnetic material;

forming an first alignment feature on a surface of a second substrate comprising;

forming a first magnetic element on a surface of the second substrate using an electroless deposition process, wherein the first magnetic element contains a ferromagnetic material; and

forming a second magnetic element on a surface of the second substrate using an electroless deposition process, wherein the second magnetic element contains a ferromagnetic material; and

aligning the first substrate to the second substrate by positioning the first substrate over the second substrate and allowing the first alignment features in the first and second substrates to align to each other.

16. The method of claim 15, wherein the material from which the first and second magnetic elements in the first alignment features on the first and second substrates are formed is selected from a group consisting of cobalt (Co), nickel (Ni) and iron (Fe).

17. The method of claim 15, wherein the material from which the first and second magnetic elements in the first alignment features on the first and second substrates are formed is selected from a group consisting of cobalt boride (CoB), cobalt phosphide (CoP), nickel boride (NiB), nickel phosphide (NiP), cobalt tungsten phosphide (CoWP), cobalt tungsten boride (CoWB), nickel tungsten phosphide (NiWP), nickel tungsten boride (NiWB), cobalt molybdenum phosphide (CoMoP), cobalt molybdenum boride (CoMoB), nickel molybdenum boride (NiMoB), nickel molybdenum phosphide (NiMoP), nickel rhenium phosphide (NiReP), nickel rhenium boride (NiReB), cobalt rhenium boride (CoReB), and cobalt rhenium phosphide (CoReP).

18. The substrate alignment and positioning feature of claim 15, wherein the first and second magnetic elements in the first and the second substrates each further comprise:

a coil assembly formed in the surface of the substrate, wherein the coil assembly comprises;

a first coil having a conductive region that extends from a first end to a second end, wherein the first coil is formed within a first layer disposed on the surface of the substrate;

a second coil having a conductive region that extends from a first end to a second end, wherein the second coil is formed in a second layer disposed over the first layer; and

an interconnect feature having a conductive region that is in electrical communication with the first end of the first coil and the third end of the second coil;

a magnetic core that has a first end that is in contact with a portion of the first layer and a second end that is in contact with a portion of the second layer and is positioned so that the conductive regions of the first coil and the second coil loop around at least a portion of the length of the magnetic core extending from the first end to the second end, wherein the magnetic core contains a ferromagnetic or ferrimagnetic material that is deposited using an electroless deposition process.

19. A method of aligning a two or more substrates, comprising:

forming a first magnetic element on a surface of a substrate using an electroless deposition process, wherein the first magnetic element contains a first ferromagnetic material;

forming a second magnetic element on a surface of a substrate using an electroless deposition process, wherein the second magnetic element contains a second ferromagnetic material; and

positioning a magnetic assembly that has a first magnetic device and a second magnetic device fixedly coupled to each other and is adapted to orient the substrate so that the first magnetic element aligns to the first magnetic device and the second magnetic element aligns to the second magnetic device.

20. The method of claim 19, wherein the material from which the first and second magnetic elements are formed is selected from a group consisting of cobalt (Co), nickel (Ni) and iron (Fe).

21. The method of claim 19, wherein the material from which the first and second magnetic elements are formed is selected from a group consisting of cobalt boride (CoB), cobalt phosphide (CoP), nickel boride (NiB), nickel phosphide (NiP), cobalt tungsten phosphide (CoWP), cobalt tungsten boride (CoWB), nickel tungsten phosphide (NiWP), nickel tungsten boride (NiWB), cobalt molybdenum phosphide (CoMoP), cobalt molybdenum boride (CoMoB), nickel molybdenum boride (NiMoB), nickel molybdenum phosphide (NiMoP), nickel rhenium phosphide (NiReP), nickel rhenium boride (NiReB), cobalt rhenium boride (CoReB), and cobalt rhenium phosphide (CoReP).