CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY

• US 20080080043A1
• Filed: 10/19/2007
• Published: 04/03/2008
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Sampsell, Jeffrey, Chui, Clarence
• Granted Patent: US 7,982,700 B2
• Time in Patent Office: Days
• US Class Current: 359/318
• CPC Class Codes: B81B 3/0086 Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.

Claims

1. A light modulator comprising:

a substrate;

a first electrode layer over the substrate;

a second electrode layer over the substrate;

a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the reflective surface movable along a direction substantially perpendicular to the reflective surface, the reflective surface movable between a first position and a second position, the first position being a first distance from the first electrode layer, the second position being a second distance from the first electrode layer; and

a conductive bus layer, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer, wherein the reflective surface moves between the first position and the second position in response to a voltage applied to the conductive bus layer.

2. The light modulator of claim 1, wherein the conductive bus layer is electrically connected to the first electrode layer.

3. The light modulator of claim 1, wherein the conductive bus layer is electrically connected to the second electrode layer.

4. The light modulator of claim 1, wherein the conductive bus layer is positioned above the second electrode layer.

5. The light modulator of claim 1, wherein the conductive bus layer is positioned adjacent to the first electrode layer.

6. The light modulator of claim 1, wherein the second electrode layer comprises the reflective surface.

7. The light modulator of claim 1, further comprising a reflective layer coupled to the second electrode layer, wherein the reflective layer comprises the reflective surface.

8. The light modulator of claim 1, wherein the conductive bus layer comprises a conductive metal.

9. The light modulator of claim 1, wherein the conductive bus layer comprises a composite alloy.

10. The light modulator of claim 1, wherein the conductive bus layer comprises aluminum, chromium, titanium, or nickel.

11. The light modulator of claim 1, wherein the conductive bus layer has a thickness between 0.1 micron and 2 microns.

12. The light modulator of claim 1, wherein the conductive bus layer has a width between 4 microns and 10 microns.

13. The light modulator of claim 1, wherein the first electrode layer has a thickness between 300 angstroms and 2,000 angstroms.

14. A method for controlling a light modulator comprising:

providing a substrate;

providing a first electrode layer over the substrate;

providing a second electrode layer over the substrate;

providing a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the reflective surface movable along a direction substantially perpendicular to the reflective surface, the reflective surface movable between a first position and a second position, the first position being a first distance from the first electrode layer, the second position being a second distance from the first electrode layer;

applying a voltage to a conductive bus layer, wherein at least a portion of the conductive bus layer is electrically coupled to at least one of the first electrode layer and the second electrode layer; and

moving the reflective surface between the first position and the second position in response to the applied voltage.

15. The method of claim 14, wherein the conductive bus layer is electrically coupled to the first electrode layer.

16. The method of claim 14, wherein the conductive bus layer is electrically coupled to the second electrode layer.

17. The method of claim 14, wherein the conductive bus layer is positioned above the second electrode layer.

18. The method of claim 14, wherein the conductive bus layer is positioned adjacent to the first electrode layer.

19. The method of claim 14, wherein the reflective surface is on the second electrode layer.

20. The method of claim 14, further comprising providing a reflective layer coupled to the second electrode layer, wherein the reflective layer comprises the reflective surface.