Reduced capacity carrier, transport, load port, buffer system

• US 20080080963A1
• Filed: 05/11/2007
• Published: 04/03/2008
• Est. Priority Date: 11/07/2005
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Bufano, Michael, Hofmeister, Christopher, Gilchrist, Ulysses, Babbs, Daniel, Fosnight, William, May, Robert
• Granted Patent: US 8,267,634 B2
• Time in Patent Office: Days
• US Class Current: 414/788
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/6732 Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier
• CPC Class Codes: H01L 21/67715 Changing the direction of the conveying path
• CPC Class Codes: H01L 21/67727 using a general scheme of a conveying path within a factory
• CPC Class Codes: H01L 21/6773 Conveying cassettes, containers or carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

Claims

1. An semiconductor workpiece processing system comprising:

at least one processing tool for processing semiconductor workpieces;

a primary transport system having one or more constant velocity transport loops;

a secondary transport system having one or more constant velocity transport loops, the secondary transport system being connected to the primary transport system through queue sections wherein, the queue sections are configured to allow the movement of material between the primary transport system and secondary transport system without disrupting the flow of either the primary or secondary transport systems; and

one or more interfaces connected to the one or more transport loops of the secondary transport system through interface shunts for interfacing with the at least one processing tool, wherein the interface shunts are configured to allow the movement of material between the one or more transport loops of the secondary transport system and the one or more interfaces without disrupting a flow of the secondary transport system;

wherein the flow of material along the primary and secondary transport systems is continuous.