Apparatus and method for delivering uniform fluid flow in a chemical deposition system

• US 20080081114A1
• Filed: 10/03/2006
• Published: 04/03/2008
• Est. Priority Date: 10/03/2006
• Status: Abandoned Application

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Krotov, Peter, Cohen, David, Mazzocco, John, Johanson, William, Pratt, Thomas M., Lind, Gary
• Application Number:
  US11/542,959
• Publication Number:
  US 20080081114A1
• Time in Patent Office: Days
• US Class Current: 427/273
• CPC Class Codes: C23C 16/45565 Shower nozzles

Abstract

Uniform fluid delivery to a substrate is provider using a diffuser. The diffuser is designed with a series of fluid (gas and/or liquid) passages of equal effective length/flow resistance, such that as the fluid passes through the diffuser, the gas exits all areas at the same time and with the same mass flux. These passages may not be physically the same, however they have the same effective length and flow resistance. The diffuser can be implemented using single or multiple stacked layers, and from several to many passages. The net effect is a uniform gas curtain to the wafer. Since the passages through the diffuser are effectively the same, the uniform gas curtain to the wafer is not sensitive to the quantity of gas, the gas flow rate or the gas pressure. Additionally, a faceplate can optionally be used to smooth out any jet effects of the diffuser exit holes.

Claims

1. An apparatus for delivering fluid flow to a substrate, comprising:

a showerhead comprising a fluid injection inlet; and

a diffuser located at a distil end of the fluid injection inlet relative to a fluid source, the diffuser comprising,

a plurality of fluid passages connecting X injection points to Y exit points, where Y>

X and the plurality of fluid passages have substantially equal effective flow resistance and deliver substantially equal mass flux.

2. The apparatus of claim 1, wherein the plurality of fluid passages comprise passages of equal length.

3. The apparatus of claim 1, wherein the plurality of fluid passages comprise passages of different lengths.

4. The apparatus of claim 1, wherein the plurality of exit points comprise holes of equal shape and diameter.

5. The apparatus of claim 1, wherein the plurality of exit point comprise holes of different shape or diameter.

6. The apparatus of claim 1, wherein 1≦

X≦

10 and 3≦

Y≦

5000.

7. The apparatus of claim 6, wherein 1≦

X≦

3 and 10≦

Y≦

1000.

8. The apparatus of claim 7, wherein X=1 and 50≦

Y≦

100.

9. The apparatus of claim 1, wherein the diffuser consists of a single layer.

10. The apparatus of claim 1, wherein the diffuser comprises a plurality of stacked diffuser stage layers.

11. The apparatus of claim 10, wherein the plurality of stage layers is 3.

12. The apparatus of claim 1, further comprising a faceplate having uniformly distributed holes configured to enhance uniform distribution of fluid exiting the diffuser exit holes.

13. The apparatus of claim 1, wherein the apparatus is integrated into a chemical deposition system further comprising a substrate for film deposition, and wherein the fluid passage configuration is such that during operation of the system the substrate surface is exposed to a substantially uniform fluid flow.

14. The apparatus of claim 1, wherein the apparatus operates under all flow conditions, including subsonic, transient, and supersonic.

15. The apparatus of claim 14, wherein the fluid flow is in a phase selected from the group consisting of gas, liquid and combinations thereof.

16. The apparatus of claim 15, wherein the fluid flow is in the gas phase.

17. The apparatus of claim 16, wherein the plurality of gas passages are configured such that during system operation gases exit the diffuser as a uniform gas curtain.

18. The apparatus of claim 1, wherein the plurality of fluid passage exit points have a cylindrical profile.

19. The apparatus of claim 1, wherein the plurality of fluid passage exit points have a conical profile.

20. A method of depositing a film from a fluid precursor, comprising:

providing in a film deposition system, a substrate for film deposition; and

delivering a film precursor fluid to the substrate surface via a diffuser, the diffuser comprising a plurality of fluid passages connecting X injection points to Y exit points, where Y>

X and the plurality of fluid passages have substantially equal effective flow resistance and delivering substantially equal mass flux.

21. The method of claim 20, wherein the substrate surface is exposed to a substantially uniform mass flux.

22. The method of claim 20, wherein delivery of the film precursor fluid occurs under all flow conditions, including subsonic, transient, and supersonic.

23. The method of claim 20, wherein the fluid precursor is in a phase selected from the group consisting of gas, liquid and combinations thereof.

24. The method of claim 20, wherein the fluid precursor is in the gas phase.

25. The method of claim 24, wherein the plurality of gas passages are configured such that during system operation gases exit the diffuser as a uniform gas curtain.