DYNAMIC COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR
First Claim
1. A computer-implemented method for facilitating plasma processing tool component management across a plurality of tools, comprising:
- receiving first component data for a first plurality of components, including component identification and usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools;
receiving second component data for a second plurality of components, including component identification and usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool;
synchronizing said first component data and said second component data with a third database, said synchronizing including synchronizing between said third database and at least one of said first database and said second database a set of rules that govern usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools;
obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools.
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Accused Products
Abstract
A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
108 Citations
18 Claims
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1. A computer-implemented method for facilitating plasma processing tool component management across a plurality of tools, comprising:
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receiving first component data for a first plurality of components, including component identification and usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools; receiving second component data for a second plurality of components, including component identification and usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool; synchronizing said first component data and said second component data with a third database, said synchronizing including synchronizing between said third database and at least one of said first database and said second database a set of rules that govern usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools; obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An article of manufacture having thereon computer readable code for facilitating plasma processing tool component management across a plurality of tools using a cross-tool database, comprising:
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computer readable code for receiving first component data for a first plurality of components, including component identification and usage history for said first plurality of components, from a first database associated with a first tool of said plurality of tools; computer readable code for receiving second component data for a second plurality of components, including component identification and usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool; computer readable code by synchronizing said first component data and said second component data with said cross-tool database, said synchronizing including synchronizing between said cross-tool database and at least one of said first database and said second database a set of rules that govern usage of at least one component of said first plurality of components and said second plurality of components, said cross-tool database being coupled to exchange data with software agents implemented at said plurality of tools. computer readable code for providing information, using said set of rules and usage history data at least in said cross-tool database, to one of said software agents about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification