Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access
First Claim
1. A gas injector for a process chamber configured with an optical access window allowing optical access to and from the process chamber, the injector comprising:
- a sleeve configured with a bore defining a path for gas and for the optical access, the bore being configured with an access area configured to flow process gas and transmit an optical access signal having a desired signal-to-noise ratio (SNR); and
a septum configured for reception in the bore, the septum being further configured to divide the access area of the bore into at least two separate access apertures, each of the at least two separate access apertures being configured to cooperate with the other access aperture to flow the process gas and to transmit the optical access signal having the desired SNR through the optical access window.
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Accused Products
Abstract
An injector provides optical access into a process chamber along an axial path from a diagnostic end point outside the process chamber through an optical access window. A hollow housing body receives first and second process gases, and surrounds the axial path. A sleeve in the body is urged against the body to minimize particle generation, and defines a first gas bore injecting the first process gas into the process chamber. A second gas bore of the sleeve surrounds the axial path for injecting the second process gas into the process chamber, allowing an optical signal to have a desired signal-to-noise ratio (SNR) at the end point. Methods provide a septum in the second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.
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Citations
23 Claims
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1. A gas injector for a process chamber configured with an optical access window allowing optical access to and from the process chamber, the injector comprising:
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a sleeve configured with a bore defining a path for gas and for the optical access, the bore being configured with an access area configured to flow process gas and transmit an optical access signal having a desired signal-to-noise ratio (SNR); and a septum configured for reception in the bore, the septum being further configured to divide the access area of the bore into at least two separate access apertures, each of the at least two separate access apertures being configured to cooperate with the other access aperture to flow the process gas and to transmit the optical access signal having the desired SNR through the optical access window. - View Dependent Claims (2, 3, 4, 5)
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6. A gas injector for simultaneously transmitting an optical signal along an optical path from a process chamber through an optical access window to a diagnostic end point outside the process chamber and injecting a first process gas into the process chamber;
- the gas injector comprising;
a housing configured to receive the process gas, the housing being further configured with a hollow body surrounding the optical path and mounting the optical access window adjacent to the diagnostic end point; a sleeve configured for reception in the hollow body to define a bore surrounding the optical path and configured with an optical access area for simultaneously injecting the process gas into the process chamber and for allowing optical access by an optical signal from the process chamber through the optical access window, the optical signal having at least a minimum signal-to-noise ratio (SNR); and a septum configured for reception in the gas bore, the septum being further configured to divide the optical access area into a plurality of optical signal apertures, each of the optical signal apertures being configured so that the optical signal apertures collectively transmit through the optical access window the optical access signal having at least the minimum SNR. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
- the gas injector comprising;
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17. A method for optical access to process events occurring in a process chamber, the method comprising the operations of:
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defining a unitary gas and optical access path configured to carry gas and transmit an optical signal from the process chamber to an analysis tool that operates in response to the signal having a desired signal-to-noise ratio (SNR) for process analysis, the defined path configuration being capable of transmitting the desired SNR that is high enough for the tool to accurately indicate the process analysis; and dividing the unitary gas and optical access path into a plurality of separate gas and optical access apertures between the process chamber and the analysis tool, the dividing configuring the separate apertures so that the apertures collectively maintain the desired SNR of the optical signal transmitted to the tool. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification