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Cantilevered Probe Detector With Piezoelectric Element

  • US 20080085212A1
  • Filed: 09/30/2005
  • Published: 04/10/2008
  • Est. Priority Date: 10/01/2004
  • Status: Active Grant
First Claim
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1. A chemical detection system for detecting a target material, comprising:

  • a cantilevered probe;

    a probe heater thermally coupled to the cantilevered probe; and

    a piezoelectric element disposed on the cantilevered probe.

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