STRESS COMPONENT MEASUREMENT METHOD

• US 20080086276A1
• Filed: 10/09/2007
• Published: 04/10/2008
• Est. Priority Date: 10/10/2006
• Status: Active Grant

• Current Assignee: Horiba Limited
• Original Assignee: Horiba Limited
• Inventors: Kashiwagi, Shinsuke, Naka, Nobuyuki
• Granted Patent: US 7,668,668 B2
• Time in Patent Office: Days
• US Class Current: 702/43
• CPC Class Codes: G01L 1/24 by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
• CPC Class Codes: G01L 5/0047 measuring forces due to residual stresses

Abstract

An object of this invention is to provide a method that can measure a stress component in a short period of time in a nondestructive manner.

The stress component measurement device 1 comprises a stress component comparison section 413 that compares a Raman spectrum L obtained in a predetermined area W1 of a reference specimen W to which a given stress component is applied with the stress component, a correlation data production section 414 that produces correlation data indicating a correlation between the Raman spectrum L and the stress component by the use of a multivariate analysis method based on the comparison results conducted by the stress component comparison section 413 wherein comparison is conducted multiple times on different predetermined areas W1, a correlation data storage section 41 that stores the correlation data, and a stress component calculation section 43 that calculates a stress component applied to an area (hereinafter called as a measurement area) W1′ of a measurement specimen W′ whose composition is the same as that of the reference specimen W based on the Raman spectrum L obtained from the measurement area W1′ and the correlation data.

Claims

1. A stress component measurement method comprising a stress component comparison step that compares a Raman spectrum obtained in a predetermined area (hereinafter called as a reference area) of a reference specimen to which a given stress component is applied with the stress component,

a correlation data production step that conducts the stress component comparison step on each of the multiple reference areas to which a different stress component is applied and that produces correlation data indicating a correlation between the Raman spectrum and the stress component by the use of a multivariate analysis method based on the result of the stress component comparison step, and

a stress component calculation step that calculates a stress component applied to a measurement area based on a Raman spectrum obtained in an area (hereinafter called as a measurement area) of a measurement specimen whose composition is the same as that of the reference specimen and the correlation data.

3. The stress component measurement method described in claim 1, wherein

the correlation data indicates a correlation between a peak shift value, a peak intensity value and a spectrum FWHM (Full Width at Half Maximum) of the Raman spectrum and each stress component.

2. A stress component measurement device comprising a stress component comparison section that compares a Raman spectrum obtained in a predetermined area (hereinafter called as a reference area) of a reference specimen to which a given stress component is applied with the stress component,

a correlation data production section that obtains comparison results conducted by the stress component comparison section for each of the multiple reference areas to which a different stress component is applied and that produces correlation data indicating a correlation between the Raman spectrum and the stress component by applying a multivariate analysis method to the comparison results, a correlation data storage section that stores the correlation data, and

a stress component calculation section that calculates a stress component applied to a measurement area based on a Raman spectrum obtained in an area (hereinafter called as a measurement area) of a measurement specimen whose composition is the same as that of the reference specimen and the correlation data.

4. A stress component measurement device comprising a stress component comparison section that compares a Raman spectrum obtained in a predetermined area (hereinafter called as a reference area) of a reference specimen to which a given stress component is applied with the stress component,

a correlation data production section that obtains comparison results conducted by the stress component comparison section for each of the multiple reference areas to which a different stress component is applied and that produces correlation data indicating a correlation between the Raman spectrum and the stress component based on the comparison results,

a correlation data storage section that stores the correlation data, and

a stress component calculation section that calculates a stress component applied to a measurement area based on a Raman spectrum obtained in an area (hereinafter called as a measurement area) of a measurement specimen whose composition is the same as that of the reference specimen and the correlation data.