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Sensor having free fall self-test capability and method therefor

  • US 20080087085A1
  • Filed: 10/11/2006
  • Published: 04/17/2008
  • Est. Priority Date: 10/11/2006
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a transducer, the transducer comprising;

    a movable element;

    a self-test actuator disposed proximate said movable element for providing an electrostatic force to move said movable element from a first position to a second position; and

    a sensing element disposed beneath said movable element, said sensing element being adapted to detect movement of said movable element from said first position to said second position along an axis perpendicular to a plane of said sensing element.

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