Components for a plasma processing apparatus
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Accused Products
Abstract
Components for a plasma processing apparatus are provided, including fastener members adapted to accommodate the stresses generated during thermal cycling. The fasteners include deflectable spacers to accommodate forces generated by the difference in thermal expansion while minimizing generation of additional particulate contamination.
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Citations
53 Claims
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1-35. -35. (canceled)
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36. A component for a plasma processing apparatus, comprising:
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a first member having a first coefficient of thermal expansion and including a plurality of through apertures having a first portion and a second portion wider than the first portion, the second portion partially defined by at least one load-bearing surface;
a plurality of first fastener members having a second coefficient of thermal expansion and mounted in the apertures of the first member, the first fastener members including a load-bearing surface;
at least one deflectable spacer mounted between the load-bearing surface defining the second portion of the aperture and the load-bearing surface of the first fastener member; and
a second fastener member engaged with each first fastener member to secure the first member to the second member at a predetermined clamping force, the at least one deflectable spacer adapted to accommodate forces generated during thermal cycling between room temperature and an elevated processing temperature. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44)
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45. A component for a plasma processing apparatus, comprising:
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a first member having a first coefficient of thermal expansion;
a second member including a plurality of through apertures having a first portion and a second portion wider than the first portion, the second portion partially defined by at least one load-bearing surface;
a plurality of first fastener members having a second coefficient of thermal expansion and mounted in the apertures of the second member, each of the first fastener members including a load-bearing surface;
at least one deflectable spacer mounted between the load-bearing surface defining the second portion of the aperture and the load-bearing surface of the first fastener member; and
a second fastener member engaged with each first fastener member to secure the first member to the second member at a predetermined clamping force, the at least one deflectable spacer adapted to accommodate forces generated during thermal cycling between room temperature and an elevated processing temperature. - View Dependent Claims (46, 47, 48, 49, 50)
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51. A showerhead electrode assembly for a plasma processing apparatus, comprising:
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an aluminum thermal control plate including a plurality of through apertures having a first portion and a second portion wider than the first portion, the second portion partially defined by at least one load-bearing surface;
a plurality of stainless steel fastener members mounted in the apertures of the thermal control plate, the first fastener members including a load-bearing surface;
a plurality of deflectable spacers mounted between the load-bearing surface of the second portion of the aperture and the load-bearing surface of the first fastener member;
a second fastener member engaged with each first fastener member to secure the thermal control plate to a backing member at a predetermined clamping force, the deflectable spacers adapted to accommodate forces generated by the difference in thermal expansion between the thermal control plate and first fastener members during thermal cycling between room temperature and an elevated processing temperature; and
a silicon electrode attached to the backing plate. - View Dependent Claims (52, 53)
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Specification