METHOD AND DEVICE FOR CHARACTERIZING WAFERS DURING THE PRODUCTION OF SOLAR CELLS
First Claim
1. A method for characterizing wafers during the production of solar cells, comprising the steps:
- a) providing a wafer and carrying out a production process with the wafer for producing a solar cell or a plurality of solar cells;
b) carrying out a wet chemical step with the wafer during the production process, wherein the wet chemical step decreases an influence of the wafer surface on the lifetime of charge carriers in the wafer;
c) irradiating the wafer with light for creating charge carriers in the wafer during the wet chemical step or after the wet chemical step;
d) determining the lifetime of the charge carriers created in step c); and
e) characterizing the wafer by means of the lifetime determined in step d).
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Abstract
The invention relates to a method for characterizing wafers during the production of solar cells, comprising the steps: a) providing a wafer and carrying out a production process with the wafer for producing a solar cell or a plurality of solar cells; b) carrying out a wet chemical step with the wafer during the production process, wherein the wet chemical step decreases an influence of the wafer surface on the lifetime of charge carriers in the wafer; c) irradiating the wafer with light for creating charge carriers in the wafer during the wet chemical step or after the wet chemical step; d) determining the lifetime of the charge carriers created in step c); and e) characterizing the wafer by means of the lifetime determined in step d). In a second aspect, the invention relates to a device for characterizing wafers during the production of solar cells.
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Citations
25 Claims
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1. A method for characterizing wafers during the production of solar cells, comprising the steps:
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a) providing a wafer and carrying out a production process with the wafer for producing a solar cell or a plurality of solar cells;
b) carrying out a wet chemical step with the wafer during the production process, wherein the wet chemical step decreases an influence of the wafer surface on the lifetime of charge carriers in the wafer;
c) irradiating the wafer with light for creating charge carriers in the wafer during the wet chemical step or after the wet chemical step;
d) determining the lifetime of the charge carriers created in step c); and
e) characterizing the wafer by means of the lifetime determined in step d). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A device for characterizing wafers during the production of solar cells comprising
a container for accommodating wet chemistry, into which a wafer can be introduced for carrying out a wet chemical step; -
a light source, which is disposed in relation to the container in such a manner that, by using the light of the light source, charge carriers can be created in a wafer, which is located in the container during a wet etching step; and
measuring means for determining the lifetime of charge carriers, which are created in a wafer located in a container by means of the light source. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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Specification