Systems and methods of testing micro-electromechanical devices

• US 20080088638A9
• Filed: 10/20/2006
• Published: 04/17/2008
• Est. Priority Date: 05/05/1994
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Miles, Mark
• Granted Patent: US 7,619,810 B2
• Time in Patent Office: Days
• US Class Current: 345/540
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2310/0278 Details of driving circuits arranged to drive both scan and data electrodes
• CPC Class Codes: G09G 3/2014 by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Claims

1. A system comprising:

an array of micro-electromechanical (MEM) structures, each MEM structure having a MEM device; and

,

a testing system situated outside of the array of the MEM structures configured to test one or more of the MEM structures for proper operation without directly reading the MEM device of the one or more MEM structures being tested.

2. The system of claim 1, wherein the MEM device is capable of being individually written to but incapable of being electrically read.

4. The system of claim 1, wherein each MEM structure comprises:

the MEM device;

a first switch coupling a column control signal to the MEM device; and

,

a second switch coupling a clear voltage to the MEM device.

5. The system of claim 4, wherein each of the first switch and the second switch is a transistor.

6. The system of claim 4, wherein the MEM device of each MEM structure comprises a light modulation MEM device.

7. The system of claim 6, wherein the system is a projection system in which light is modulated by the array of MEM structures in accordance with image data from an image source and subsequently projected from the system.

8. The system of claim 1, wherein the MEM structures of the array are organized into columns and rows, the system further comprising:

a column control mechanism to select one or more of the columns of the MEM structures and,

a row control mechanism to select one or more of the rows of the MEM structures.

10. The system of claim 8, wherein the testing system is communicatively coupled to the column control mechanism and the row control mechanism to charge selected one or more of the columns of the MEM structures through the column control mechanism and to charge selected one or more of the rows of the MEM structures through the row control mechanism.

11. The system of claim 8, wherein each of the column control mechanism and the row control mechanism comprises a multiplexer.

29. The system of claim 1, wherein the testing system comprises a computer in communication with the array of MEM structures.

30. The system of claim 29, wherein the computer is configured to calculate deformation data of the MEM structures.

31. The system of claim 1, wherein each MEM device comprises an interferometric cavity formed between a membrane and a substrate.

32. The system of claim 31, wherein the substrate is at least partially transmissive.

33. The system of claim 32, wherein the substrate comprises at least one film layer.

34. The system of claim 31, wherein the membrane comprises silicon, aluminum, or germanium.

35. The system of claim 31, wherein the membrane comprises reflective material.

36. The system of claim 35, wherein the membrane is configured to include color information in light modulated by the membrane.

37. The system of claim 36, wherein the color information is indicative of a degree of residual stress in the MEM device.

38. The system of claim 37, wherein the membrane comprises one or more edges, and wherein at least a portion of one edge of the membrane is attached to the substrate.

39. The system of claim 31, wherein the membrane is configured to deform based on residual stress.

40. The system of claim 39, wherein the membrane is configured as a single cantilever form.

41. The system of claim 40, wherein the membrane is configured as a double cantilever form.

3. (canceled)

9. (canceled)

12. A system comprising:

an array of nodes organized into rows and columns, each node having a micro-electromechanical (MEM) device, a first switch coupling a column line to the MEM device and a second switch coupling a voltage to the MEM device; and

,

a testing mechanism situated outside of the array of nodes to test each node for proper operation by selecting a row and a column of the nodes in which the node is located to turn on the first and the second switches of the node.

13. The system of claim 12, wherein each row of the nodes comprises a first row line connected to a control of the first switch of each node of the row, and a second row line connected to a control of the second switch of each node of the row.

14. The system of claim 12, wherein each column of the nodes comprises a column line coupled to an input of the first switch of each node of the column.

15. The system of claim 12, wherein the first switch of each node has an input coupled to a column of the nodes in which the node is located, and the second switch of each node has an output coupled to a clear voltage.

16. The system of claim 12, wherein the MEM device is incapable of being electrically read.

18. The system of claim 12, wherein the system is a projection system in which light is modulated by the array of MEM device assemblies in accordance with image data from an image source and subsequently projected from the system.

17. (canceled)

19. A system comprising:

an array of micro-electromechanical (MEM) device assemblies, each MEM device assembly including a MEM device capable of being individually written to but incapable of being electrically read; and

,

means for testing each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.

22. The system of claim 19, wherein the system is a projection system in which light is modulated by the array of MEM device assemblies in accordance with image data from an image source and subsequently projected from the system.

20. (canceled)

21. (canceled)

23-28. -28. (canceled)