Detachable electrostatic chuck having sealing assembly
First Claim
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1. A detachable electrostatic chuck for attachment to a pedestal in a process chamber, the detachable electrostatic chuck comprising:
- (a) an electrostatic puck comprising a ceramic body having an embedded electrode, a substrate receiving surface, and an annular ledge;
(b) a baseplate below the electrostatic puck, the baseplate having a peripheral ledge extending beyond the annular ledge of the ceramic body, and a bottom surface; and
(c) a sealing assembly comprising a sealing plate and a concentric sealing ring, the sealing assembly being bonded to the bottom surface of the baseplate.
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Abstract
A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
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Citations
30 Claims
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1. A detachable electrostatic chuck for attachment to a pedestal in a process chamber, the detachable electrostatic chuck comprising:
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(a) an electrostatic puck comprising a ceramic body having an embedded electrode, a substrate receiving surface, and an annular ledge; (b) a baseplate below the electrostatic puck, the baseplate having a peripheral ledge extending beyond the annular ledge of the ceramic body, and a bottom surface; and (c) a sealing assembly comprising a sealing plate and a concentric sealing ring, the sealing assembly being bonded to the bottom surface of the baseplate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of fabricating an electrostatic chuck, the method comprising the steps of:
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(a) forming an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate receiving surface, a bottom surface, and a peripheral ledge; (b) forming a preform comprising a porous ceramic having a peripheral edge, top surface, and bottom surface; (c) forming a sealing assembly comprising a sealing plate and a sealing ring; (d) holding (i) the top surface of the preform against the bottom surface of the electrostatic puck so that the peripheral edge of the preform extends beyond the peripheral ledge of the ceramic body of the electrostatic puck, and (ii) the sealing assembly positioned against the bottom surface of the preform; (e) infiltrating molten metal into the porous ceramic of the preform and between the gaps of the ceramic body, preform, and sealing assembly, to; (i) bond the ceramic body to the preform with a metal bond; (ii) infiltrate the porous ceramic of the preform with the metal; and (iii) bond the sealing assembly to the to the bottom surface of the preform. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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26. A sealing assembly for forming a gas tight seal between an electrostatic chuck and a pedestal in a process chamber, the sealing ring comprising:
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(a) a sealing plate that is D-shaped with a flat edge connected to a semicircular perimeter; and (b) a sealing ring comprising a circular ring which is concentric to the sealing plate, wherein the sealing plate and sealing ring each comprise a surface flatness of less than about 200 microns. - View Dependent Claims (27, 28, 29, 30)
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Specification