Alternating phase shift mask inspection using biased inspection data
First Claim
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1. A system for inspecting an alternating phase shift mask, comprising:
- an optical scanner configured to scan the alternating phase shift mask and generate optical image data;
a database configured to store inspection data biased to compensate for the optical scanning response of the alternating phase shift mask with the optical scanner; and
an image processor configured to determine if a defect is present in the alternating phase shift mask, wherein the image processor determines the presence of a defect by comparing the generated optical image data to the biased inspection data, wherein a variation between the generated optical image data and the biased inspection data that exceeds a user selectable threshold is indicative of a defect in the alternating phase shift mask.
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Abstract
An inspection system uses inspection data biased to compensate for mismatches that occur as a result of using an optical lithography system to print an alternating phase shift mask that operates at a wavelength of light that is different from the wavelength of light that an inspection system uses to inspect the mask for defects.
16 Citations
20 Claims
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1. A system for inspecting an alternating phase shift mask, comprising:
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an optical scanner configured to scan the alternating phase shift mask and generate optical image data; a database configured to store inspection data biased to compensate for the optical scanning response of the alternating phase shift mask with the optical scanner; and an image processor configured to determine if a defect is present in the alternating phase shift mask, wherein the image processor determines the presence of a defect by comparing the generated optical image data to the biased inspection data, wherein a variation between the generated optical image data and the biased inspection data that exceeds a user selectable threshold is indicative of a defect in the alternating phase shift mask. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for inspecting an alternating phase shift mask, comprising:
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scanning the alternating phase shift mask with an optical scanner; generating optical image data from the scan of the alternating phase shift mask; retrieving inspection data biased to compensate for the optical scanning response of the alternating phase shift mask with the optical scanner; and determining if a defect is present in the alternating phase shift mask in accordance with the generated optical image data and the biased inspection data. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A computer-readable medium storing computer instructions for enabling an optical inspection system to determine a defect in an alternating phase shift mask, the computer instructions comprising:
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obtaining optical image data of the alternating phase shift mask generated from an optical scanner; retrieving inspection data biased to compensate for the optical scanning response of the alternating phase shift mask with the optical scanner; and determining if a defect is present in the alternating phase shift mask in accordance with the generated optical image data and the biased inspection data. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification