Shallow source MOSFET
First Claim
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1. A method of fabricating a semiconductor device, comprising:
- forming a hard mask on a substrate having a top substrate surface;
forming a trench in the substrate, through the hard mask;
depositing gate material in the trench, where the amount of gate material deposited in the trench extends beyond the top substrate surface; and
removing the hard mask to leave a gate structure that extends substantially above the top substrate surface.
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Abstract
A method of fabricating a semiconductor device comprises forming a hard mask on a substrate having a top substrate surface, forming a trench in the substrate, through the hard mask, depositing gate material in the trench, where the amount of gate material deposited in the trench extends beyond the top substrate surface, and removing the hard mask to leave a gate structure that extends substantially above the top substrate surface.
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Citations
8 Claims
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1. A method of fabricating a semiconductor device, comprising:
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forming a hard mask on a substrate having a top substrate surface;
forming a trench in the substrate, through the hard mask;
depositing gate material in the trench, where the amount of gate material deposited in the trench extends beyond the top substrate surface; and
removing the hard mask to leave a gate structure that extends substantially above the top substrate surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification