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APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL

  • US 20080091306A1
  • Filed: 12/05/2007
  • Published: 04/17/2008
  • Est. Priority Date: 06/24/2002
  • Status: Active Grant
First Claim
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1. A system comprising a plurality of flow paths, each between a gas inlet and an outlet, the system further comprising:

  • a mass flow controller for each of the flow paths, each mass flow controller including a mass flow sensor for sensing the mass flow along the respective flow path and a control valve, responsive to a control signal, for controlling the mass flow through the corresponding outlet;

    a pressure sensor for each of the flow paths for measuring fluctuations in pressure of gas along the respective flow path; and

    at least one process controller for generating each control signal as a function of the sensed mass flow and measured fluctuations in pressure of gas so as to provide a substantially constant flow of gas at each of the outlets irrespective of fluctuations in pressure of gas at the respective inlet.

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