Method of reducing the drift rate of accelerometer and accelerometer with reduced drift rate
First Claim
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1. An accelerometer comprising:
- a chamber;
a proof mass supported by an elastic element within said chamber, said elastic element being formed of fused silica;
a sensor sensing displacement of said proof mass; and
means inhibiting interaction of water vapour with said elastic element.
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Abstract
An accelerometer comprises a chamber and a proof mass supported by an elastic element within the chamber. The elastic element is formed of fused silica. A sensor senses displacement of the proof mass. Means to inhibit interaction of water vapour with the elastic element is provided.
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Citations
31 Claims
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1. An accelerometer comprising:
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a chamber; a proof mass supported by an elastic element within said chamber, said elastic element being formed of fused silica; a sensor sensing displacement of said proof mass; and means inhibiting interaction of water vapour with said elastic element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An accelerometer comprising:
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a chamber; a proof mass supported by a fused silica elastic element within said chamber; a sensor sensing displacement of said proof mass; and a substantially water vapour free environment surrounding said elastic element. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A method of reducing the drift rate of an accelerometer comprising a chamber housing a fused silica elastic member, said method comprising:
reducing the interaction of the elastic member with water vapour in the chamber. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
Specification