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Method of reducing the drift rate of accelerometer and accelerometer with reduced drift rate

  • US 20080092653A1
  • Filed: 10/18/2006
  • Published: 04/24/2008
  • Est. Priority Date: 10/18/2006
  • Status: Abandoned Application
First Claim
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1. An accelerometer comprising:

  • a chamber;

    a proof mass supported by an elastic element within said chamber, said elastic element being formed of fused silica;

    a sensor sensing displacement of said proof mass; and

    means inhibiting interaction of water vapour with said elastic element.

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