Aberration Corrector and Method of Aberration Correction

• US 20080093563A1
• Filed: 10/18/2007
• Published: 04/24/2008
• Est. Priority Date: 10/20/2006
• Status: Abandoned Application

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Hosokawa, Fumio, Sawada, Hidetaka
• Application Number:
  US11/874,646
• Publication Number:
  US 20080093563A1
• Time in Patent Office: Days
• US Class Current: 250/396.00R
• CPC Class Codes: H01J 2237/1534 Aberrations
• CPC Class Codes: H01J 2237/26 Electron or ion microscopes
• CPC Class Codes: H01J 37/153 Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Abstract

A chromatic aberration corrector has a relatively simple correction system capable of correcting the electron optical system of a transmission electron microscope for chromatic aberration. Furthermore, high-resolution imaging is enabled. The correction system uses a first multipole element for producing a quadrupole field to produce a concave lens effect. However, surplus two-fold astigmatism is left behind. This two-fold astigmatism is removed by inserting a second multipole element for producing a second quadrupole field. The first and second multipole elements are set to mutually opposite polarities. That is, the two-fold astigmatism is canceled out by combining the first and second multipole elements. A cylindrically symmetrical electron beam having spread can be corrected for chromatic aberration by the concave lens effect.

Claims

1. An aberration corrector for correcting aberration produced in a lens disposed in the direction of motion of a spreading electron beam which is cylindrically symmetrical, said aberration corrector comprising:

a first quadrupole field-producing multipole element on which the electron beam not yet corrected for the aberration impinges, the first quadrupole field-producing multipole element producing a first quadrupole field; and

a second quadrupole field-producing multipole element from which the electron beam corrected for the aberration exits, the second quadrupole field-producing multipole element producing a second quadrupole field,

wherein each of said first and second quadrupole fields produces an optical system having a two-fold astigmatic effect of a primary term of the quadrupole field and a focusing effect in the direction of divergence of a cylindrically symmetrical type, said focusing effect being produced by higher-order terms of the quadrupole field which have magnitudes increasing at higher rates than the primary term when the length in the direction of motion of the electron beam is increased, and

wherein said first and second quadrupole fields are set to mutually opposite polarities, whereby the two-fold astigmatic effects of the first and second quadrupole fields on the cylindrically symmetrical electron beam having the spread are canceled out and only the focusing effect in the direction of divergence of the cylindrically symmetrical type is used for correction of the aberration in the lens.

2. An aberration corrector as set forth in claim 1, wherein a relationship between the magnitude of the focusing effect in the direction of divergence of the cylindrically symmetrical type caused by the higher-order terms of the quadrupole field produced by the quadrupole field-producing multipole element and the length of the quadrupole field in the direction of motion of the electron beam is previously found, and wherein the length of the quadrupole field in the direction of motion of the electron beam necessary to correct the aberration in the lens is determined using the relationship and based on the magnitude of the effect necessary to correct the aberration.

3. An aberration corrector as set forth in any one of claims 1 and 2, wherein the aberration in the lens corrected by using a combination of said first and second quadrupole field-producing multipole elements is chromatic aberration.

4. An aberration corrector as set forth in claim 3, wherein said lens is corrected for chromatic aberration by causing the quadrupole field-producing multipole elements to produce the quadrupole fields having lengths in the direction of motion of the electron beam to create an optical system which produces the focusing effect in the direction of divergence of the cylindrically symmetrical type and which is different in refractive index from the lens.

5. An aberration corrector as set forth in claim 3, wherein said lens is corrected for chromatic aberration by causing the quadrupole field-producing multipole elements to produce the quadrupole fields having lengths in the direction of motion of the electron beam to create an optical system which produces the focusing effect in the direction of divergence of the cylindrically symmetrical type and by making use of the fact that the absolute value of a negative amount of chromatic aberration of the optical system is greater than the amount of chromatic aberration in the lens if the optical system is identical in refractive index with the lens.

6. An aberration corrector as set forth in any one of claims 1 and 2, wherein said quadrupole field produced by each of said quadrupole field-producing multipole elements is any one of an electrostatic quadrupole field, a magnetic quadrupole field, and a quadrupole field obtained by superimposing an electrostatic quadrupole field and a magnetic quadrupole field.

7. An aberration corrector as set forth in any one of claims 1 and 2, wherein a pair of transfer lenses is disposed between the two quadrupole field-producing multipole elements.

8. An aberration corrector as set forth in any one of claims 1 and 2, wherein the quadrupole fields produced respectively by the two quadrupole field-producing multipole elements are different in length taken in the direction of motion of the electron beam.

9. An aberration corrector as set forth in any one of claims 1 and 2, wherein each of said quadrupole field-producing multipole elements is a hexapole element which uses an electrostatic field, a magnetic field, or both and on which a quadrupole field is superimposed such that the hexapole element acts to produce an electrostatic field or an electric two-fold field.

10. An aberration corrector as set forth in any one of claims 1 and 2, wherein each of said quadrupole field-producing multipole elements is a dodecapole element which uses an electrostatic field, a magnetic field, or both and on which a quadrupole field is superimposed such that the dodecapole element acts to produce an electrostatic field or an electric two-fold field.

11. An aberration corrector as set forth in any one of claims 1 and 2, wherein each of said quadrupole field-producing multipole elements is an octopole element which uses an electrostatic field, a magnetic field, or both and on which a quadrupole field is superimposed such that the octopole element acts to produce an electrostatic field or an electric two-fold field.

12. An aberration corrector as set forth in any one of claims 1 and 2, wherein a pair of transfer lenses is disposed between said second quadrupole field-producing multipole element and the objective lens.

13. A method of correcting aberration produced in a lens disposed in the direction of motion of an electron beam, said method comprising the steps of:

preparing two multipole elements each producing a quadrupole field having a length in the direction of motion of the electron beam;

causing each of the multipole elements to produce a two-fold astigmatic effect and a focusing effect in the direction of divergence of a cylindrically symmetrical type, said two-fold astigmatic effect increasing in magnitude as the length of the quadrupole field in the direction of motion of the beam is increased, said focusing effect being produced by higher-order terms of the quadrupole field; and

combining the two quadrupole fields produced by the multipole elements such that the two-fold astigmatic effects produced by the two quadrupole fields are canceled out, whereby only the focusing effects in the direction of divergence of the cylindrically symmetrical type are used to correct the lens for the aberration for the cylindrically symmetrical electron beam having spread.