PROCESS FOR MODIFYING OFFSET VOLTAGE CHARACTERISTICS OF AN INTERFEROMETRIC MODULATOR
First Claim
1. A process development method, comprising:
- identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and
modifying the processing parameter to shift the non-zero offset voltage closer to zero.
3 Assignments
0 Petitions
Accused Products
Abstract
An interferometric modulator manufactured according to a particular set of processing parameters may have a non-zero offset voltage. A process has been developed for modifying the processing parameters to shift the non-zero offset voltage closer to zero. For example, the process may involve identifying a set of processing parameters for manufacturing an interferometric modulator that results in a non-zero offset voltage for the interferometric modulator. The set of processing parameters may then be modified to shift the non-zero offset voltage closer to zero. For example, modifying the set of processing parameters may involve modifying one or more deposition parameters used to make the interferometric modulator, applying a current (e.g., a counteracting current) to the interferometric modulator, and/or annealing the interferometric modulator. Interferometric modulators made according to the set of modified processing parameters may have improved performance and/or simpler drive schemes.
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Citations
38 Claims
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1. A process development method, comprising:
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identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and
modifying the processing parameter to shift the non-zero offset voltage closer to zero. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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19. A process development method, comprising:
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identifying a means for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and
modifying the means for manufacturing to shift the non-zero offset voltage closer to zero. - View Dependent Claims (20)
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21. A method of modifying a MEMS device, comprising:
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identifying a MEMS device having a non-zero offset voltage; and
applying a current to the MEMS device to thereby shift the non-zero offset voltage closer to zero. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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Specification