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NANOMETER-SCALE ABLATION USING FOCUSED, COHERENT EXTREME ULTRAVIOLET/SOFT X-RAY LIGHT

  • US 20080093775A1
  • Filed: 08/17/2007
  • Published: 04/24/2008
  • Est. Priority Date: 08/19/2006
  • Status: Abandoned Application
First Claim
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1. Apparatus for nanometer-scale ablation of material from the surface of a sample, comprising in combination:

  • a chamber capable of being evacuated;

    pump means for evacuating said chamber to a chosen pressure;

    a source of pulsed coherent light having a chosen wavelength in the range between 1 nm and 100 nm, and a chosen fluence, wherein the pulsed light is introduced into said chamber;

    a Fresnel zone plate disposed within said chamber for receiving the chosen wavelength of light from said source of light, and for focusing the light; and

    means for positioning said sample in the region of the focused light within said chamber such that the focused light is incident on the surface of said sample, whereby material is removed from the surface of said sample.

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