Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
First Claim
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1. A movable body system, the system comprising:
- a movable body that is movable substantially along a predetermined plane holding an object, and has a grating placed along a plane on a rear surface side of the object substantially parallel with the predetermined plane, and light that has entered from the outside can proceed inside toward the grating; and
a measurement system that makes light enter the inside of the movable body from the outside, and measures positional information of the movable body in a measurement direction in the predetermined plane by receiving light including a reflected light from the grating.
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Abstract
A laser beam emitted by an encoder main body enters a wafer table via a PBS from the outside, and reaches a grating at a point that is located right under exposure area, and is diffracted by the grating. Then, by receiving interference light of a first polarized component that has returned from the grating and a second polarized component reflected by the PBS, positional information of the wafer table is measured. Accordingly, because the first polarized component, which has passed through PBS passes through the wafer table until it is synthesized with the second polarized component again, does not proceed through the atmosphere outside, position measurement of the wafer table can be performed with high precision without the measurement beam being affected by the fluctuation of the atmosphere around the wafer table.
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Citations
79 Claims
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1. A movable body system, the system comprising:
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a movable body that is movable substantially along a predetermined plane holding an object, and has a grating placed along a plane on a rear surface side of the object substantially parallel with the predetermined plane, and light that has entered from the outside can proceed inside toward the grating; and
a measurement system that makes light enter the inside of the movable body from the outside, and measures positional information of the movable body in a measurement direction in the predetermined plane by receiving light including a reflected light from the grating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 59)
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41-58. -58. (canceled)
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60. An exposure method in which an energy beam is irradiated on an object so as to form a predetermined pattern on the object wherein
a movable body that holds the object and also has a grating placed along a surface substantially parallel to a predetermined plane on a rear surface side of the object, and in which light entering from the outside can proceed toward the grating in the inside, is moved along the predetermined plane, and light is made to enter the inside of the movable body from the outside, and positional information of the movable body in a measurement direction in the predetermined plane is measured by receiving light including a reflected light from the grating.
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72. An exposure method in which an energy beam is irradiated on an object so as to form a predetermined pattern on the object wherein
a first and second lights are made to enter the inside of a movable body that holds the object and can move in a predetermined plane, and has a grating placed along a surface substantially parallel to the predetermined plane on the rear surface side of the object, and positional information of the movable body in the measurement direction in the predetermined plane is measured using a first and second measurement unit which receive the light proceeding in the inside and is reflected by the grating, and a measurement of the positional information of the movable body using one of the first and second measurement units is switched to a measurement of the positional information of the movable body using the other measurement unit of the first and second measurement units.
Specification
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Current AssigneeNikon Corporation
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Original AssigneeNikon Corporation
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InventorsShibazaki, Yuichi
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current355/53
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CPC Class CodesG01D 5/266 by interferometric means G0...G01D 5/305 controlling the movement of...G03F 7/70758 Drive means, e.g. actuators...G03F 7/70775 Position control, e.g. inte...
