Illumination optical system, exposure apparatus, and exposure method
First Claim
1. An illumination optical system that illuminates an illuminated surface with light including a predetermined polarized state supplied from a light source, comprising:
- a light directing device that directs the light from the light source to the illuminated surface, the light directing device being positioned in a light path between the light source and the illuminated surface; and
a polarized state fluctuation correcting device that corrects fluctuations in the polarized state on the illuminated surface, the polarized state fluctuation correcting device being positioned in the light path between the light source and the illuminated surface.
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Accused Products
Abstract
An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.
21 Citations
33 Claims
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1. An illumination optical system that illuminates an illuminated surface with light including a predetermined polarized state supplied from a light source, comprising:
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a light directing device that directs the light from the light source to the illuminated surface, the light directing device being positioned in a light path between the light source and the illuminated surface; and
a polarized state fluctuation correcting device that corrects fluctuations in the polarized state on the illuminated surface, the polarized state fluctuation correcting device being positioned in the light path between the light source and the illuminated surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. An exposure method for exposing a pattern on a mask positioned at a first plane onto a photosensitive substrate positioned at a second plane, comprising:
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providing light;
illuminating the mask with the light provided in the first step;
exposing the pattern on the mask illuminated in the second step onto the photosensitive substrate; and
correcting fluctuations of a polarized state of the light on the second plane. - View Dependent Claims (31, 32, 33)
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Specification