×

SPOT ARRAY GENERATION USING A MEMS LIGHT MODULATOR

  • US 20080094682A1
  • Filed: 10/19/2006
  • Published: 04/24/2008
  • Est. Priority Date: 10/19/2006
  • Status: Active Grant
First Claim
Patent Images

1. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:

  • first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein;

    the first film is adapted to be moved with respect to the base; and

    the second film is adapted to be moved with respect to the base and with respect to the first film.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×