DUAL MODE MEMS SENSOR

• US 20080098814A1
• Filed: 10/31/2006
• Published: 05/01/2008
• Est. Priority Date: 10/31/2006
• Status: Abandoned Application

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Henrickson, Jens, Platt, William P.
• Application Number:
  US11/554,867
• Publication Number:
  US 20080098814A1
• Time in Patent Office: Days
• US Class Current: 73/504.02
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/14 by making use of gyroscopes gyroscopes per se G01C19/00

Abstract

A system and method for determining acceleration along a motor axis of a MEMS gyroscope includes a processor. The processor includes a notch filter to remove a sinusoid from an instantaneous voltage from a motor pick up of the MEMS gyroscope. A memory bus allows random access to data stored in a processor readable memory. A processor-readable memory in operative engagement with the memory bus allows access to the processor-readable memory containing data. The data includes a model relating at least one instantaneous voltage in a remaining instantaneous voltage to an acceleration of a proof mass along the motor axis. Instructions to the processor include a routine to compare the at least one instantaneous voltage in the model to the remaining instantaneous voltage.

Claims

1. A system for determining acceleration along a motor axis of a MEMS gyroscope comprising:

a processor having;

a notch filter to remove a sinusoid from an instantaneous voltage from a motor pick up of the MEMS gyroscope;

a memory bus for random access to data stored in a processor-readable memory; and

a processor-readable memory in operative engagement with the memory bus, the processor-readable memory containing data including;

a model relating at least one instantaneous voltage in a remaining instantaneous voltage to an acceleration of a proof mass along the motor axis; and

instructions to the processor including;

a routine to instruct the processor to compare the at least one instantaneous voltage in the model to the remaining instantaneous voltage.

2. The system of claim 1, wherein the notch filter includes a passive element filter.

3. The system of claim 1, wherein the notch filter includes a dynamic element filter.

4. The system of claim 1, wherein the notch filter includes digital signal processing.

5. The system of claim 4, wherein the notch filter further includes a Fourier transform.

6. The system of claim 1, wherein the processor includes a look-up engine.

7. The system of claim 1, wherein the model includes a transform relating remaining instant voltage to displacement of a proof mass.

8. A method for determining an acceleration along the motor axis of a MEMS gyroscope comprises:

receiving a motor pick off instantaneous voltage;

filtering a proof mass oscillation from the instantaneous voltage to generate a remaining signal;

comparing the remaining signal to a model relating instantaneous voltage to displacement of a proof mass along the motor axis; and

deriving an acceleration based upon the displacement of the proof mass.

9. The method of claim 8, wherein the filtering includes:

passing the motor pick off instantaneous voltage though a notch filter.

10. The method of claim 9, wherein the notch filter is a passive element filter.

11. The method of claim 9, wherein the notch filter is a dynamic element filter.

12. The method of claim 8, wherein filtering includes digital signal processing.

13. The method of claim 12, wherein the digital signal processing includes a Fourier transform.

14. The method of claim 8, wherein the comparing of a remaining signal includes activating a look-up engine.

15. A processor for deriving an acceleration along a motor axis of a MEMS gyroscope, the processor comprising:

a notch filter receiving an instantaneous voltage from a motor pick off of the MEMS gyroscope to generate a remaining signal;

a memory bus retrieving data from a processor-readable memory in accord with the received instantaneous voltage; and

a look-up engine for transforming the remaining signal into an acceleration signal indicative of acceleration along the motor axis.

16. The processor of claim 15, wherein the notch filter includes a passive element filter.

17. The processor of claim 15, wherein the notch filter includes a dynamic element filter.

18. The processor of claim 15 wherein the notch filter includes digital signal processing.

19. The processor of claim 15 wherein the notch filter includes a Fourier transform.

20. The processor of claim 15, wherein the memory bus includes:

the processor-readable memory containing data including;

a model relating at least one instantaneous voltage in a remaining instantaneous voltage to an acceleration of a proof mass along the motor axis; and

instructions to the processor including;

a routine to compare the at least one instantaneous voltage in the model to the remaining instantaneous voltage