TEMPERATURE CONTROLLED MULTI-GAS DISTRIBUTION ASSEMBLY
First Claim
1. A lid assembly for a processing chamber, comprising:
- an upper manifold having fluidly isolated first and second flow paths defined therethrough; and
a lower manifold with a top side coupled to the upper manifold, and a bottom side having a first plurality of outlets fluidly coupled to the first flow path and a second plurality of outlets fluidly coupled to the second flow path, respectively, wherein the lower manifold comprises a plurality of concentric rings having an inner surface in sealing contact with an outer surface of an adjoining ring adapted to form a material to material seal therebetween.
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Accused Products
Abstract
An apparatus and method for a gas distribution plate is provided. The gas distribution plate has a first manifold which includes a plurality of concentric channels for providing at least two distinct gases to a processing zone above a substrate. A portion of the plurality of channels perform a thermal control function and are separated from the remaining channels, which provide separated gas flow channels within the gas distribution plate. The gas flow channels are in fluid communication with a second manifold which includes a plurality of concentric rings. Apertures formed in the rings are in fluid communication with the gas flow channels and the processing zone. The gases are provided to the processing zone above the substrate, and do not mix within the gas distribution plate.
485 Citations
20 Claims
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1. A lid assembly for a processing chamber, comprising:
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an upper manifold having fluidly isolated first and second flow paths defined therethrough; and a lower manifold with a top side coupled to the upper manifold, and a bottom side having a first plurality of outlets fluidly coupled to the first flow path and a second plurality of outlets fluidly coupled to the second flow path, respectively, wherein the lower manifold comprises a plurality of concentric rings having an inner surface in sealing contact with an outer surface of an adjoining ring adapted to form a material to material seal therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A lid assembly for a processing chamber, comprising:
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an upper manifold having a plurality of fluidly isolated channels partially formed therein; and a lower manifold coupled to the upper manifold, wherein a first portion of the plurality of fluidly isolated channels include first and second gas channels in fluid communication with the lower manifold, and a second portion of the plurality of fluidly isolated channels include a plurality of thermal control channels. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An apparatus for delivering a process fluid to a processing chamber, comprising:
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a manifold assembly with a top side and a bottom side, the top side having a plurality of fluidly isolated circular channels partially formed thereon, and the bottom side having annular outlets formed therein; and a lid plate having a top, a bottom, and an edge, wherein the bottom of the lid plate is coupled to the top side of the manifold assembly, and the lid plate has at least two gas passages and a plurality of thermal control fluid passages formed therethrough in fluid communication with the plurality of circular channels. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification