Scanning electron microscope and a method for pattern composite inspection using the same
First Claim
1. A scanning electron microscope comprising:
- a reference image storage unit for storing a reference image transcribing a reference pattern;
an inspected image pick-up unit for picking up, on the basis of the reference image, an inspected image transcribing an inspection pattern which matches with said reference pattern;
a critical dimension measuring unit for measuring critical dimensions of said inspection pattern by using said inspected image; and
a defect inspection unit for performing an inspection of a defect inside or outside said inspection pattern by comparing said reference image with said inspected image.
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Accused Products
Abstract
A scanning electron microscope capable of performing alone the critical dimension measurement and the defect inspection is provided. The scanning electron microscope has a reference image storage unit for storing a reference image transcribing a reference pattern, an inspected image pick-up unit for picking up, on the basis of the reference image, an inspected image transcribing an inspection pattern which pattern-matches with the reference pattern, a critical dimension measuring unit for measuring critical dimensions of the inspection pattern by using the inspected image, and a defect inspection unit for performing an inspection of a defect inside or outside the inspection pattern by comparing the reference image with the inspected image.
54 Citations
10 Claims
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1. A scanning electron microscope comprising:
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a reference image storage unit for storing a reference image transcribing a reference pattern;
an inspected image pick-up unit for picking up, on the basis of the reference image, an inspected image transcribing an inspection pattern which matches with said reference pattern;
a critical dimension measuring unit for measuring critical dimensions of said inspection pattern by using said inspected image; and
a defect inspection unit for performing an inspection of a defect inside or outside said inspection pattern by comparing said reference image with said inspected image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for pattern composite inspection using a scanning electron microscope, comprising the steps of:
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storing a reference image transcribing a reference pattern by means of the scanning electron microscope;
picking up, by means of said scanning electron microscope on the basis of said reference image, an inspected image transcribing an inspection pattern which pattern-matches with said reference pattern;
measuring critical dimensions of said inspection pattern by using said inspected image; and
inspecting a defect inside or outside said inspection pattern by comparing said reference image with said inspected image.
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Specification