Exposure Apparatus and Device Manufacturing Method
First Claim
1. An exposure apparatus that irradiates a substrate with exposure light via a liquid to expose the substrate, comprisinga display apparatus that indicates at least one of a status of filling of an optical path space of the exposure light with the liquid and a status of recovery of the liquid from the optical path space.
1 Assignment
0 Petitions
Accused Products
Abstract
To provide an exposure apparatus that allows an understanding of the condition of the apparatus and that can prevent a leakage or scattering of a liquid. The exposure apparatus (EX) includes a display apparatus (D) that indicates at least one of a status of filling of an optical path space (K1) of the exposure light (EL) with the liquid (LQ) and a status of recovering of the liquid (LQ) from the optical path space (K1).
27 Citations
9 Claims
-
1. An exposure apparatus that irradiates a substrate with exposure light via a liquid to expose the substrate, comprising
a display apparatus that indicates at least one of a status of filling of an optical path space of the exposure light with the liquid and a status of recovery of the liquid from the optical path space.
-
9. A device manufacturing method, comprising:
-
providing an exposure apparatus constructed to irradiate a substrate with exposure light via a liquid to expose the substrate, the exposure apparatus including a display apparatus that indicates at least one of a status of filling of an optical path space of the exposure light with the liquid and a status of recovery of the liquid from the optical path space; and using the exposure apparatus to expose a substrate.
-
Specification