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Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method

  • US 20080100899A1
  • Filed: 12/28/2005
  • Published: 05/01/2008
  • Est. Priority Date: 01/05/2005
  • Status: Active Grant
First Claim
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1. A mirror device characterized by comprising:

  • a mirror which is supported to be pivotable with respect to a mirror substrate;

    a driving electrode which is formed on an electrode substrate facing said mirror substrate; and

    an antistatic structure which is arranged in a space between said mirror and said electrode substrate.

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