VORTEX CHAMBER LIDS FOR ATOMIC LAYER DEPOSITION

• US 20080102208A1
• Filed: 10/24/2007
• Published: 05/01/2008
• Est. Priority Date: 10/26/2001
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kim, Steven, Yuan, Xiaoxiong, Wu, Dien-Yeh, Ma, Paul, Bajaj, Puneet, Chu, Schubert, Aubuchon, Joseph
• Application Number:
  US11/923,583
• Publication Number:
  US 20080102208A1
• Time in Patent Office: Days
• US Class Current: 427/255.28
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 16/45502 Flow conditions in reaction chamber
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45563 Gas nozzles

Abstract

Embodiments of the invention relate to apparatuses and methods for depositing materials on substrates during atomic layer deposition processes. In one embodiment, a chamber for processing substrates is provided which includes a chamber lid assembly containing a centrally positioned gas dispersing channel, wherein a converging portion of the gas dispersing channel tapers towards a central axis of the gas dispersing channel and a diverging portion of the gas dispersing channel tapers away from the central axis. The chamber lid assembly further contains a tapered bottom surface extending from the diverging portion of the gas dispersing channel to a peripheral portion of the chamber lid assembly, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate and two conduits are coupled to gas inlets within the converging portion of the gas dispersing channel and positioned to provide a circular gas flow through the gas dispersing channel.

Claims

1. A chamber for processing substrates, comprising:

a substrate support comprising a substrate receiving surface; and

a chamber lid assembly comprising;

a gas dispersing channel at a central portion of the chamber lid assembly, wherein a converging portion of the gas dispersing channel tapers towards a central axis of the gas dispersing channel and a diverging portion of the gas dispersing channel tapers away from the central axis;

a tapered bottom surface extending from the diverging portion of the gas dispersing channel to a peripheral portion of the chamber lid assembly, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface;

a first conduit coupled to a first gas inlet within the converging portion of the gas dispersing channel; and

a second conduit coupled to a second gas inlet within the converging portion of the gas dispersing channel, wherein the first conduit and the second conduit are positioned to provide a circular gas flow pattern through the gas dispersing channel.

2. The chamber of claim 1, wherein the first conduit and the second conduit are independently positioned to direct gas at an inner surface of the converging portion of the gas dispersing channel.

3. The chamber of claim 2, wherein the circular gas flow pattern comprises a flow pattern selected from the group consisting of vortex, helix, spiral, twirl, twist, coil, whirlpool, and derivatives thereof.

4. The chamber of claim 3, wherein the circular gas flow pattern extends at least about 1.5 revolutions around the central axis of the gas dispersing channel.

5. The chamber of claim 4, wherein the circular gas flow pattern extends at least about 4 revolutions around the central axis of the gas dispersing channel.

6. The chamber of claim 1, wherein a first valve is coupled to the first conduit and a second valve is coupled to the second conduit, and a first gas source is in fluid communication to the first valve and a second gas source is in fluid communication to the second valve.

7. The chamber of claim 6, wherein the first and second valves enable an atomic layer deposition process with a pulse time of about 2 seconds or less.

8. The chamber of claim 7, wherein the pulse time is within a range from about 0.05 seconds to about 0.5 seconds.

9. The chamber of claim 1, wherein the first conduit and the second conduit are independently positioned at an angle greater than 0°

from the central axis of the gas dispersing channel.

10. The chamber of claim 9, wherein the circular gas flow pattern comprises a flow pattern selected from the group consisting of vortex, helix, spiral, twirl, twist, coil, whirlpool, and derivatives thereof.

11. The chamber of claim 1, further comprising a reaction zone having a volume of about 3,000 cm³ or less, wherein the reaction zone is defined between the tapered bottom surface and the substrate receiving surface.

12. The chamber of claim 11, wherein the volume is about 1,500 cm³ or less.

13. The chamber of claim 12, wherein the volume is about 600 cm³ or less.

14. A chamber for processing substrates, comprising:

a substrate support having a substrate receiving surface; and

a chamber lid assembly comprising;

a gas dispersing channel at a central portion of the chamber lid assembly, wherein a converging portion of the gas dispersing channel tapers towards a central axis of the gas dispersing channel and a diverging portion of the gas dispersing channel tapers away from the central axis;

a first conduit coupled to a first gas inlet within the converging portion of the gas dispersing channel;

a second conduit coupled to a second gas inlet within the converging portion of the gas dispersing channel, wherein the first conduit and the second conduit are positioned to provide a circular gas flow pattern; and

a first valve coupled to the first conduit and a second valve coupled to the second conduit, where the first and second valves enable an atomic layer deposition process with a pulse time of about 2 seconds or less.

15. The chamber of claim 14, wherein the chamber lid assembly further comprises a tapered bottom surface extending from the diverging portion of the gas dispersing channel to a peripheral portion of the chamber lid assembly.

16. The chamber of claim 15, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface.

17. The chamber of claim 14, wherein the pulse time is about 1 second or less.

18. The chamber of claim 17, wherein the pulse time is within a range from about 0.05 seconds to about 0.5 seconds.

19. The chamber of claim 14, wherein a first gas source is in fluid communication to the first valve and a second gas source is in fluid communication to the second valve, and the first conduit and the second conduit are independently positioned to direct gas at an inner surface of the converging portion of the gas dispersing channel.

20. The chamber of claim 19, wherein the circular gas flow pattern comprises a flow pattern selected from the group consisting of vortex, helix, spiral, twirl, twist, coil, whirlpool, and derivatives thereof.

21. The chamber of claim 20, wherein the circular gas flow pattern extends at least about 1.5 revolutions around the central axis of the gas dispersing channel.

22. The chamber of claim 21, wherein the circular gas flow pattern extends at least about 4 revolutions around the central axis of the gas dispersing channel.

23. The chamber of claim 14, wherein the first conduit and the second conduit are independently positioned at an angle of greater than 0°

from the central axis of the gas dispersing channel.

24. The chamber of claim 14, further comprising a reaction zone having a volume of about 3,000 cm³ or less, wherein the reaction zone is defined between the tapered bottom surface and the substrate receiving surface.

25. A method for depositing a material on a substrate, comprising:

positioning a substrate on a substrate support within a process chamber comprising a chamber body and a chamber lid assembly, wherein the chamber lid assembly comprises;

a gas dispersing channel at a central portion of the chamber lid assembly, wherein a converging portion of the gas dispersing channel tapers towards a central axis of the gas dispersing channel and a diverging portion of the gas dispersing channel tapers away from the central axis;

a tapered bottom surface extending from the diverging portion of the gas dispersing channel to a peripheral portion of the chamber lid assembly, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate;

a first conduit coupled to a first gas inlet within the converging portion of the gas dispersing channel; and

a second conduit coupled to a second gas inlet within the converging portion of the gas dispersing channel, wherein the first conduit and the second conduit are positioned to provide a circular gas flow pattern;

flowing at least one carrier gas through the first and second conduits to form a circular flowing gas;

exposing the substrate to the circular flowing gas;

pulsing at least one precursor into the circular flowing gas; and

depositing a material comprising at least one element derived from the at least one precursor onto the substrate.