ACCELEROMETER DERIVED GYRO VIBRATION RECTIFICATION ERROR COMPENSATION

• US 20080105050A1
• Filed: 11/08/2006
• Published: 05/08/2008
• Est. Priority Date: 11/08/2006
• Status: Abandoned Application

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Kraetz, William F.
• Application Number:
  US11/557,820
• Publication Number:
  US 20080105050A1
• Time in Patent Office: Days
• US Class Current: 73/496
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

An apparatus compensates for vibration rectification error present in a MEMS gyroscope output signal. The MEMS gyroscope has an axis of rotation normal to an operative plane. The apparatus includes at least one accelerometer situated to generate an acceleration signal indicating acceleration along the axis of rotation. A processor generates a compensation signal based upon the acceleration signal. An output stage amplifies the gyroscope output signal according to the compensation signal. The processor retrieves compensation data from a processor-readable memory according to the acceleration signal. The compensation signal is further based upon the compensation data.

Claims

1. An apparatus compensating for vibration rectification error present in a MEMS gyroscope output signal indicative of rotation about an axis of rotation normal to an operative plane, the MEMS gyroscope affixed to a mount, the apparatus comprising:

at least one accelerometer situated on the mount to generate a vibration signal indicating acceleration of the mount along the axis of rotation;

a processor to generate a compensation signal based upon the signal; and

an output stage to amplify the gyroscope output signal according to the compensation signal.

2. The apparatus of claim 1, wherein:

the processor retrieves compensation data from a processor-readable memory according to the vibration signal; and

the compensation signal is further based upon the compensation data.

3. The apparatus of claim 1, wherein:

the at least one accelerometer includes an assembly of three orthogonal accelerometers including

a first accelerometer output signal from a first accelerometer indicating acceleration of the mount along a first accelerometer axis;

a second accelerometer output signal from a second accelerometer indicating acceleration of the mount along a second accelerometer axis, the second accelerometer being situated such that the second accelerometer axis is orthogonal to the first accelerometer axis;

a third accelerometer output signal from a third accelerometer indicating acceleration of the mount along a third accelerometer axis, the third accelerometer being situated such that the third accelerometer axis is orthogonal to both of the first accelerometer axis and the second accelerometer axis;

the processor derives the vibration signal based upon first accelerometer signal, the second accelerometer signal, and the third accelerometer signal.

4. The apparatus of claim 1, wherein:

the MEMS gyroscope output signal includes;

a first MEMS gyroscope output signal indicating rotation about a first axis of rotation;

a second MEMS gyroscope output signal indicating rotation about a second axis of rotation, the second MEMS gyroscope being situated such that the second axis of rotation is orthogonal to the first axis of rotation;

a third MEMS gyroscope output signal indicating rotation about a third axis of rotation, the third MEMS gyroscope being situated such that the third axis of rotation is orthogonal to both of the first axis of rotation and the second axis of rotation; and

wherein the processor is configured derive a first vibration vector parallel to the first axis of rotation;

a second vibration vector parallel to the second axis of rotation;

a third vibration vector parallel to the third axis of rotation.

5. The apparatus of claim 4, wherein the at least one accelerometer includes an assembly of three orthogonal accelerometers including

a first accelerometer output signal from a first accelerometer indicating acceleration of the mount along a first accelerometer axis;

a second accelerometer output signal from a second accelerometer indicating acceleration of the mount along a second accelerometer axis, the second accelerometer being situated such that the second accelerometer axis is orthogonal to the first accelerometer axis;

a third accelerometer output signal from a third accelerometer indicating acceleration of the mount along a third accelerometer axis, the third accelerometer being situated such that the third accelerometer axis is orthogonal to both of the first accelerometer axis and the second accelerometer axis.

6. The apparatus of claim 5, wherein the first accelerometer axis is parallel to the first axis of rotation.

7. The apparatus of claim 5, wherein the first accelerometer axis is skewed from the first axis of rotation, the second axis of rotation, and the third axis of rotation.

8. The apparatus of claim 1, wherein the mount is a silicon die.

9. The apparatus of claim 1, where the mount is a monolithic block.

10. A method for developing a compensation data residing on a processor-readable memory, the method comprising:

vibrating a mount at a vibration frequency and a vibration amplitude, the mount having at least one MEMS gyroscope generating a MEMS gyroscope signal indicating rotation about an axis of rotation and at least one accelerometer generating an accelerometer signal indicative of vibration along the axis of rotation;

receiving the accelerometer signal and the gyroscope signal at a signal processor; and

deriving a vibration signal to include frequency and amplitude data and based upon the accelerometer signal.

11. The method of claim 10, further comprising:

deriving a compensation signal based upon a relationship between the vibration signal, the accelerometer signal and the gyroscope signal.

12. The method of claim 11, further comprising:

storing the compensation signal in a processor-readable memory according to the vibration signal.

13. The method of claim 10, wherein:

the at least one accelerometer includes;

a first accelerometer output signal from a first accelerometer indicating acceleration of the mount along a first accelerometer axis;

a second accelerometer output signal from a second accelerometer indicating acceleration of the mount along a second accelerometer axis, the second accelerometer being situated such that the second accelerometer axis is orthogonal to the first accelerometer axis;

a third accelerometer output signal from a third accelerometer indicating acceleration of the mount along a third accelerometer axis, the third accelerometer being situated such that the third accelerometer axis is orthogonal to both of the first accelerometer axis and the second accelerometer axis; and

the processor is further configured to resolve the first accelerometer output signal, the second accelerometer output signal, and the third accelerometer output signal into a vibration signal along the axis of rotation.

14. The method of claim 13, wherein:

the at least one MEMS gyroscope includes;

a first MEMS gyroscope output signal indicating rotation about a first axis of rotation;

a second MEMS gyroscope output signal indicating rotation about a second axis of rotation, the second MEMS gyroscope being situated such that the second axis of rotation is orthogonal to the first axis of rotation;

a third MEMS gyroscope output signal indicating rotation about a third axis of rotation, the third MEMS gyroscope being situated such that the third axis of rotation is orthogonal to both of the first axis of rotation and the second axis of rotation; and

the processor is further configured to resolve the first accelerometer output signal, the second accelerometer output signal, and the third accelerometer output signal into a first vibration signal along the first axis of rotation;

a second vibration signal along the second axis of rotation; and

a third vibration signal along the third axis of rotation.

15. The method of claim 14, further comprising:

deriving a first compensation signal based upon a relationship between the first vibration signal, the first accelerometer signal and the first gyroscope signal;

deriving a second compensation signal based upon a relationship between the second vibration signal, the second accelerometer signal and the second gyroscope signal; and

deriving a third compensation signal based upon a relationship between the third vibration signal, the third accelerometer signal and the third gyroscope signal.

16. The method of claim 15, further comprising:

storing the first compensation signal in a processor-readable memory according to the first vibration signal;

storing the second compensation signal in a processor-readable memory according to the second vibration signal; and

storing the third compensation signal in a processor-readable memory according to the third vibration signal.

17. A signal processor assembly responsive to an accelerometer signal, the processor assembly comprising:

a processor-readable memory storing;

a compensation signal look-up table for retrieving compensation factors based upon a vibration signal;

a processor having;

an input for receiving an acceleration signal;

a processing stage for deriving a compensation bias based upon the acceleration signal and at least one compensation coefficient retrieved from the memory based upon the vibration signal; and

an output stage for supplying the bias to an output signal of a MEMS gyroscope.

18. The processor of claim 17, the output stage including:

At least one operational amplifier configured to remove a bias from the MEMS gyroscope signal.