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ANGULAR VELOCITY SENSOR AND ELECTRONIC DEVICE

  • US 20080105052A1
  • Filed: 10/30/2007
  • Published: 05/08/2008
  • Est. Priority Date: 10/30/2006
  • Status: Active Grant
First Claim
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1. An angular velocity sensor, comprising:

  • a base portion;

    three arm portions that extend as one piece from the base portion to an approximately same direction;

    a piezoelectric film formed on one surface of each of the arm portions;

    drive electrodes for excitation formed on the piezoelectric films of at least two arm portions that are positioned on outer sides, among the three arm portions; and

    detection electrodes for angular velocity detection formed on the piezoelectric film of at least a centrally-positioned arm portion, among the three arm portions, wherein among the three arm portions, the two arm portions that are positioned on outer sides are excited in phase, and the centrally-positioned arm portion is excited in opposite phase with the two arm portions that are positioned on outer sides, the drive electrodes are excited the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed, and the detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.

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