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Acceleration sensor

  • US 20080105053A1
  • Filed: 12/14/2007
  • Published: 05/08/2008
  • Est. Priority Date: 02/16/2005
  • Status: Active Grant
First Claim
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1. An acceleration sensor comprising:

  • a first substrate;

    a second substrate consisting of a first layer opposed to said first substrate and one or more second layers formed on part of a surface of said first layer; and

    a sensor portion provided in a sealed cavity portion formed between said first substrate and said second substrate which are opposed to each other, wherein said second layers are formed above said sensor portion.

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